Thermal erosion of metal surfaces under the action of fine-focused scanning electron beams

A model of thermal erosion of a metal surface under the action of low-energy fine-focused scanning electron beams is developed. Peculiarities of thermal erosion of a metal surface irradiated by these beams with a power of 1... 10 kW are considered. The influence of the irradiation parameters on the intensity of carrying the substance from the surface is analyzed. It is shown that due to such beams, the coefficients of metal erosion reach values of 10 ³ atom/electron and even greater. This is characteristic of powerful submicrosecond electron and ion beams, but the efficiency of using their energy turns out to be much higher.