The YASHMA-2 plasma facility for the deposition of coatings on solid surfaces

Peter Semenovich Anan'in, D. D. Bainov, L. G. Kositsyn, V. P. Krivobokov, V. N. Legostaev, S. V. Yudakov

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A laboratory facility for the deposition of coatings on solid surfaces using a magnetron-discharge plasma and ion beams is described. Its main performance characteristics and functional capabilities are presented.

Original languageEnglish
Pages (from-to)547-550
Number of pages4
JournalInstruments and Experimental Techniques
Volume47
Issue number4
DOIs
Publication statusPublished - Jul 2004

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Instrumentation

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