The YASHMA-2 plasma facility for the deposition of coatings on solid surfaces

Peter Semenovich Anan'in, D. D. Bainov, L. G. Kositsyn, V. P. Krivobokov, V. N. Legostaev, S. V. Yudakov

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A laboratory facility for the deposition of coatings on solid surfaces using a magnetron-discharge plasma and ion beams is described. Its main performance characteristics and functional capabilities are presented.

Original languageEnglish
Pages (from-to)547-550
Number of pages4
JournalInstruments and Experimental Techniques
Volume47
Issue number4
DOIs
Publication statusPublished - Jul 2004

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solid surfaces
plasma jets
Ion beams
ion beams
Plasmas
coatings
Coatings

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Instrumentation

Cite this

The YASHMA-2 plasma facility for the deposition of coatings on solid surfaces. / Anan'in, Peter Semenovich; Bainov, D. D.; Kositsyn, L. G.; Krivobokov, V. P.; Legostaev, V. N.; Yudakov, S. V.

In: Instruments and Experimental Techniques, Vol. 47, No. 4, 07.2004, p. 547-550.

Research output: Contribution to journalArticle

Anan'in, Peter Semenovich ; Bainov, D. D. ; Kositsyn, L. G. ; Krivobokov, V. P. ; Legostaev, V. N. ; Yudakov, S. V. / The YASHMA-2 plasma facility for the deposition of coatings on solid surfaces. In: Instruments and Experimental Techniques. 2004 ; Vol. 47, No. 4. pp. 547-550.
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