The structural-phase composition of the magnetron-sputtered Al-Si-N-O-based coatings

T. I. Dorofeeva, T. A. Gubaidulina, V. P. Sergeev, M. P. Kalashnikov, A. V. Voronov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Current work describes the production of multi-component single-layer and multi-layer coatings by pulsed magnetron sputtering. The study scrutinizes the coatings in terms of their composition (X-ray diffraction analysis, XRD) and microstructure (transmission electron microscopy, TEM). The results demonstrate that the multi-component single-layer Al-Si-N coatings have nanocrystalline structure, while all the layers of the multi-layer Al-Si-N/Al-Si-O coatings are amorphous due to the ingress of oxygen.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology
EditorsVictor E. Panin, Vasily M. Fomin
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735440463
DOIs
Publication statusPublished - 14 Dec 2020
EventInternational Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020 - Tomsk, Russian Federation
Duration: 5 Oct 20209 Oct 2020

Publication series

NameAIP Conference Proceedings
Volume2310
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

ConferenceInternational Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020
CountryRussian Federation
CityTomsk
Period5.10.209.10.20

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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