The role of energy in formation of sputtered nanocomposite films

J. Musil, J. Šůna

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Citations (Scopus)

Abstract

The paper analysis the effect of energy E, delivered to the growing film by bombarding ions and fast condensing atoms, on its (i) structure, (ii) elemental and phase composition and (iii) physical properties. A special attention is devoted to the macrostress a generated in sputtered films under ion bombardment. The conditions under which thick, low-stress sputtered films can be produced are given.

Original languageEnglish
Title of host publicationNew Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference
Pages291-296
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2005
EventInternational Conference on New Frontiers of Process Science and Engineering in Advanced Materials, PSEA' 04 - Kyoto, Japan
Duration: 24 Nov 200426 Nov 2004

Publication series

NameMaterials Science Forum
Volume502
ISSN (Print)0255-5476

Conference

ConferenceInternational Conference on New Frontiers of Process Science and Engineering in Advanced Materials, PSEA' 04
CountryJapan
CityKyoto
Period24.11.0426.11.04

Fingerprint

Nanocomposite films
nanocomposites
Film growth
Ion bombardment
Phase composition
condensing
Physical properties
Ions
Atoms
energy
bombardment
ions
physical properties
atoms

Keywords

  • Fast condensing atoms
  • Ion bombardment
  • Macrostress
  • Sputtering
  • Structure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Musil, J., & Šůna, J. (2005). The role of energy in formation of sputtered nanocomposite films. In New Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference (pp. 291-296). (Materials Science Forum; Vol. 502). https://doi.org/10.4028/0-87849-980-6.291

The role of energy in formation of sputtered nanocomposite films. / Musil, J.; Šůna, J.

New Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference. 2005. p. 291-296 (Materials Science Forum; Vol. 502).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Musil, J & Šůna, J 2005, The role of energy in formation of sputtered nanocomposite films. in New Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference. Materials Science Forum, vol. 502, pp. 291-296, International Conference on New Frontiers of Process Science and Engineering in Advanced Materials, PSEA' 04, Kyoto, Japan, 24.11.04. https://doi.org/10.4028/0-87849-980-6.291
Musil J, Šůna J. The role of energy in formation of sputtered nanocomposite films. In New Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference. 2005. p. 291-296. (Materials Science Forum). https://doi.org/10.4028/0-87849-980-6.291
Musil, J. ; Šůna, J. / The role of energy in formation of sputtered nanocomposite films. New Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference. 2005. pp. 291-296 (Materials Science Forum).
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