The research of diamond coatings morphology evolution under the action of reactive ion etching in perpendicular direction

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The evolution of the CVD diamond coatings morphology after perpendicular direction reactive ion etching was investigated. During the surface treatment, the average surface roughness was reduced. The efficiency of the etching decreases with the increasing of the processing time, until the surface roughness has been reduced by 30±5%. The height points spread over the surface were measured. The quality of the obtained films was investigated using the Raman spectroscopy.

Original languageEnglish
Title of host publicationAdvanced Materials for Technical and Medical Purpose
EditorsGeorgiy Osokin, Gennady E. Remnev, Sergey Psakhie, Valeriy Pogrebenkov, Nikolay Ratakhin
PublisherTrans Tech Publications Ltd
Pages87-92
Number of pages6
ISBN (Print)9783035710649
DOIs
Publication statusPublished - 1 Jan 2016
EventWorkshop on Advanced Materials for Technical and Medical Purpose, AMTMP-2016 - Tomsk, Russian Federation
Duration: 15 Feb 201617 Feb 2016

Publication series

NameKey Engineering Materials
Volume712
ISSN (Print)1013-9826

Conference

ConferenceWorkshop on Advanced Materials for Technical and Medical Purpose, AMTMP-2016
CountryRussian Federation
CityTomsk
Period15.2.1617.2.16

Keywords

  • Coatings
  • Diamond coating
  • Diamond film
  • Glow discharge plasma
  • Hydrogen plasma
  • Ion beam etching
  • Ion etching
  • Reactive ion etching
  • Roughness
  • Surface morphology

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Okhotnikov, V. V., Linnik, S. A., & Gaydaychuk, A. V. (2016). The research of diamond coatings morphology evolution under the action of reactive ion etching in perpendicular direction. In G. Osokin, G. E. Remnev, S. Psakhie, V. Pogrebenkov, & N. Ratakhin (Eds.), Advanced Materials for Technical and Medical Purpose (pp. 87-92). (Key Engineering Materials; Vol. 712). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.712.87