Abstract
This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 6-1010 W/cm2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 34-39 |
| Number of pages | 6 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 292 |
| DOIs | |
| Publication status | Published - 1 Dec 2012 |
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Keywords
- Charged-particle pulsed beams
- Coating deposition
- Evaporation
- Surface erosion
ASJC Scopus subject areas
- Instrumentation
- Nuclear and High Energy Physics
Cite this
The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles. / Bleykher, G. A.; Krivobokov, V. P.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 292, 01.12.2012, p. 34-39.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles
AU - Bleykher, G. A.
AU - Krivobokov, V. P.
PY - 2012/12/1
Y1 - 2012/12/1
N2 - This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 6-1010 W/cm2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.
AB - This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 6-1010 W/cm2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.
KW - Charged-particle pulsed beams
KW - Coating deposition
KW - Evaporation
KW - Surface erosion
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UR - http://www.scopus.com/inward/citedby.url?scp=84869476943&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2012.09.014
DO - 10.1016/j.nimb.2012.09.014
M3 - Article
VL - 292
SP - 34
EP - 39
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
ER -