The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles

Abstract

This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 ⁶-10¹⁰ W/cm². The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.

Original language	English
Pages (from-to)	34-39
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	292
DOIs	https://doi.org/10.1016/j.nimb.2012.09.014
Publication status	Published - 1 Dec 2012

Keywords

Charged-particle pulsed beams
Coating deposition
Evaporation
Surface erosion

ASJC Scopus subject areas

Instrumentation
Nuclear and High Energy Physics

Access to Document

10.1016/j.nimb.2012.09.014

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title = "The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles",

abstract = "This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 6-1010 W/cm2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.",

keywords = "Charged-particle pulsed beams, Coating deposition, Evaporation, Surface erosion",

author = "Bleykher, {G. A.} and Krivobokov, {V. P.}",

year = "2012",

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doi = "10.1016/j.nimb.2012.09.014",

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T1 - The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles

AU - Bleykher, G. A.

AU - Krivobokov, V. P.

PY - 2012/12/1

Y1 - 2012/12/1

N2 - This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 6-1010 W/cm2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.

AB - This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10 6-1010 W/cm2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.

KW - Charged-particle pulsed beams

KW - Coating deposition

KW - Evaporation

KW - Surface erosion

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

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