The Raduga multipurpose ion/plasma source for surface modification of construction materials

A. I. Ryabchikov, N. M. Arsubov, N. A. Vasilyiev, S. V. Dektyarev

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

In this article a repetitively pulsed vacuum arc ion/plasma source for property modification of near-surface layers in construction materials is described. The Raduga ion source provides both high concentration implantation and optimum two-element implantation. These advantages can be achieved by using not only pure single-element or mixed fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another unique feature of the source is its ability to generate a sequence consisting of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Two-element operating conditions provide the possibility of compensating for sputtering during implantation by neutral atom and plasma deposition. The technological capabilities of the source are: (a) single-element ion implantation; (b) multi-element implantation using compositional cathodes; (c) multi-element implantation with beam composition and ion energy controlled during irradiation and even from pulse to pulse; (d) high-concentration implantation; (e) thin-film deposition; and (f) thin-film deposition under ion irradiation conditions.

Original languageEnglish
Pages (from-to)124-127
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume59-60
Issue numberPART 1
DOIs
Publication statusPublished - 1 Jul 1991

Fingerprint

Plasma sources
Ion implantation
Surface treatment
implantation
Ions
Plasma deposition
Ion bombardment
pulses
ions
ion irradiation
Thin films
Ion sources
Chemical analysis
Ion beams
Sputtering
Cathodes
Irradiation
Vacuum
neutral atoms
Fluxes

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

The Raduga multipurpose ion/plasma source for surface modification of construction materials. / Ryabchikov, A. I.; Arsubov, N. M.; Vasilyiev, N. A.; Dektyarev, S. V.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 59-60, No. PART 1, 01.07.1991, p. 124-127.

Research output: Contribution to journalArticle

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