The preparation of calcium phosphate coatings on titanium and nickel-titanium by rf-magnetron-sputtered deposition: Composition, structure and micromechanical properties

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Thin calcium phosphate coatings with a thickness of 0.09 to 2.7 μm were prepared by radio-frequency magnetron sputtering deposition on NiTi and Ti substrates at a substrate temperature of 500 °C in argon atmosphere. Scanning electron microscopy (SEM) showed that the surface structure is uniform and dense without visible defects (pores and microcracks). Rutherford backscattering spectroscopy (RBS) and energy-dispersive X-ray spectroscopy (EDX) confirmed that the coating contains calcium, phosphorus, and oxygen with a uniform composition. Crystallographically, the coating consists of crystalline hydroxyapatite which is also supported by infrared spectroscopy. The mechanical characteristics of the coating were measured by nanoindentation (Vickers indenter), giving a nanohardness of 10 GPa and a Young's modulus of 110 GPa. The strength of adhesion of the calcium phosphate coating to the metallic substrates depended on the coating's thickness and decreased for a thickness larger than 1.6 μm. No difference was observed between NiTi and Ti substrates.

Original languageEnglish
Pages (from-to)3913-3920
Number of pages8
JournalSurface and Coatings Technology
Issue number16
Publication statusPublished - 15 May 2008



  • Adhesion strength
  • Calcium phosphate coating
  • rf-magnetron sputtering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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