The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Aluminum nitride is widely-used material for semiconductor devices and ceramics production. Despite the large number of known ways to obtain AlN powder, the problem of synthesizing high-purity and nanosized product is still urgent. This paper shows results on plasma dynamic synthesis of aluminum nitride using system based coaxial magneto plasma accelerator. The influence of using gaseous or solid precursors on such characteristics of the final product as phase content and particle size distribution was investigated. According to X- Ray diffractometry AlN phase content is increased in the case of use of solid nitrogen- containing precursor (melamine) in comparison with the use of gaseous nitrogen. The particle sizes distribution histograms are built in accordance with the data of bright-field TEM-images and shown in this paper. The most of particles are less than 100 nm in both experiment but there are some differences, depended on the precursor type, that are also described.

Original languageEnglish
Title of host publicationIOP Conference Series: Materials Science and Engineering
PublisherInstitute of Physics Publishing
Volume93
Edition1
DOIs
Publication statusPublished - 13 Oct 2015
Event21st International Conference for Students and Young Scientists: Modern Technique and Technologies, MTT 2015 - Tomsk, Russian Federation
Duration: 5 Oct 20159 Oct 2015

Other

Other21st International Conference for Students and Young Scientists: Modern Technique and Technologies, MTT 2015
CountryRussian Federation
CityTomsk
Period5.10.159.10.15

Fingerprint

Aluminum nitride
Particle size analysis
Nitrogen
Plasma accelerators
Plasmas
Melamine
Semiconductor devices
Powders
X ray diffraction analysis
Transmission electron microscopy
Experiments
aluminum nitride
melamine

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

Cite this

The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors. / Shanenkov, I.; Sivkov, A.; Ivashutenko, A.; Shanenkova, Yu.

IOP Conference Series: Materials Science and Engineering. Vol. 93 1. ed. Institute of Physics Publishing, 2015. 012051.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shanenkov, I, Sivkov, A, Ivashutenko, A & Shanenkova, Y 2015, The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors. in IOP Conference Series: Materials Science and Engineering. 1 edn, vol. 93, 012051, Institute of Physics Publishing, 21st International Conference for Students and Young Scientists: Modern Technique and Technologies, MTT 2015, Tomsk, Russian Federation, 5.10.15. https://doi.org/10.1088/1757-899X/93/1/012051
Shanenkov I, Sivkov A, Ivashutenko A, Shanenkova Y. The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors. In IOP Conference Series: Materials Science and Engineering. 1 ed. Vol. 93. Institute of Physics Publishing. 2015. 012051 https://doi.org/10.1088/1757-899X/93/1/012051
Shanenkov, I. ; Sivkov, A. ; Ivashutenko, A. ; Shanenkova, Yu. / The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors. IOP Conference Series: Materials Science and Engineering. Vol. 93 1. ed. Institute of Physics Publishing, 2015.
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