The influence of the deposition parameters on the properties of an rf-magnetron-deposited nanostructured calcium phosphate coating and a possible growth mechanism

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The deposition of a biocompatible calcium phosphate coating on the surface of materials for biomedical implants by rf-magnetron sputtering is reported. The deposition parameters to prepare either stoichiometric crystalline hydroxyapatite or amorphous calcium phosphate coating with a molar Ca/P ratio from 1.53 to 3.88 were established. Crystalline hydroxyapatite coating with a Ca/P ratio of 1.60±0.07 can be deposited if the rf-power density is 0.49W cm-2 and if the samples are arranged within the area of the target erosion zone. A thorough investigation of the influence of rf-power, DC-bias on the substrate, deposition time on the properties of the calcium phosphate coating allowed to formulate a mechanism for the film growth.

Original languageEnglish
Pages (from-to)3600-3606
Number of pages7
JournalSurface and Coatings Technology
Issue number12
Publication statusPublished - 15 Mar 2011



  • Calcium phosphate
  • Hydroxyapatite
  • Implant materials
  • Rf-magnetron sputtering

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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