The influence of some model parameters on the impurity distribution implanted into substrate surface

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Abstract

The model for description of the initial stage of ion implantation into the surface layer of the metal is presented. The interdependence of embedded impurity concentration and deformations arising from the impact of particles on the surface is investigated. The model takes into account the particle diffusion, the finite time of mass flux relaxation; the stress appearance due to a composition change of the surface layer and a mass transfer phenomenon under a stress gradient action. It is established that the interaction of mechanical waves and concentration leads to a distribution of concentration not corresponding to a pure diffusion process. The examples of coupled problems solution for different sets of model parameters are presented.

Original languageEnglish
Article number012085
JournalIOP Conference Series: Materials Science and Engineering
Volume124
Issue number1
DOIs
Publication statusPublished - 2 Jun 2016

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Impurities
Substrates
Mass transfer
Mechanical waves
Ion implantation
Metals
Chemical analysis

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

Cite this

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abstract = "The model for description of the initial stage of ion implantation into the surface layer of the metal is presented. The interdependence of embedded impurity concentration and deformations arising from the impact of particles on the surface is investigated. The model takes into account the particle diffusion, the finite time of mass flux relaxation; the stress appearance due to a composition change of the surface layer and a mass transfer phenomenon under a stress gradient action. It is established that the interaction of mechanical waves and concentration leads to a distribution of concentration not corresponding to a pure diffusion process. The examples of coupled problems solution for different sets of model parameters are presented.",
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