Application of high frequency short pulse plasma immersion low energy ion implantation for titanium nitride coating deposition using vacuum arc metal plasma and hot-cathode gas-discharge plasma on R6M5 alloy was investigated. Implementation of negative repetitively pulsed bias with bias amplitude 2 kV, pulse duration 5 μs and pulse frequency 105 Hz leads to 6.2-fold decrease of vacuum arc macroparticle surface density for macroparticles with diameter less than 0.5 μm. Ion sputtering due coating deposition reduces the production rate approximately by 30%. It was found that with bias amplitude range from 1.1 to 1.4 kV and pulse duration 5 μs yields to formation of coatings with local hardness up to 40 GPa. This paper presents the results of experimental studies of adhesion strength, tribological properties and surface morphology of deposited TiN coatings.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 4 May 2017|
|Event||5th International Congress on Energy Fluxes and Radiation Effects 2016, EFRE 2016 - Tomsk, Russian Federation|
Duration: 2 Oct 2016 → 7 Oct 2016
ASJC Scopus subject areas
- Physics and Astronomy(all)