The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti1 –xyAl x yN Coatings Obtained by Reactive Magnetron Sputtering

A. R. Shugurov, A. A. Akulinkin, A. M. Kasterov, M. P. Kalashnikov

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Abstract: The evolution of the elemental composition, surface morphology, microstructure, and mechanical properties of Ti1 –xyAlxyN coatings deposited by reactive magnetron sputtering has been studied when the ratio of the partial pressure of nitrogen to the total pressure of reactive gas mixture was increased from 0.1 to 0.5. It is established that most significant changes in the relative content of Ti, Al, and Ta in as-deposited coatings take place when this ratio is varied from 0.1 to 0.3. The observed changes in the elemental composition of Ti1 –xyAlxyN coatings do not influence their phase composition, but lead to changes in the microstructure and mechanical characteristics.

Original languageEnglish
Pages (from-to)418-422
Number of pages5
JournalTechnical Physics Letters
Volume45
Issue number4
DOIs
Publication statusPublished - 1 Apr 2019
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti<sub>1 –</sub><sub>x</sub><sub>–</sub><sub>y</sub>Al<sub> x</sub>Tа<sub> y</sub>N Coatings Obtained by Reactive Magnetron Sputtering'. Together they form a unique fingerprint.

Cite this