The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam

M. Surmeneva, A. Tyurin, Timur Mukhamedrashidovich Mukhametkaliyev, A. Teresov, A. Koval, T. Pirozhkova, I. Shuvarin, E. Chudinova, R. Surmenev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.

Original languageEnglish
Title of host publicationIOP Conference Series: Materials Science and Engineering
PublisherInstitute of Physics Publishing
Volume98
Edition1
DOIs
Publication statusPublished - 3 Nov 2015
Event3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology, Nanobiotech 2015 - Tambov, Russian Federation
Duration: 21 May 201522 May 2015

Other

Other3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology, Nanobiotech 2015
CountryRussian Federation
CityTambov
Period21.5.1522.5.15

Fingerprint

Calcium phosphate
Silicon
Titanium
Magnetron sputtering
Electron beams
Powders
Durapatite
Nanohardness
Phosphate coatings
Hydroxyapatite
Substrates
Coatings
Elastic moduli
Crystallite size
Sputtering
calcium phosphate
Chemical activation
Acids

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

Cite this

Surmeneva, M., Tyurin, A., Mukhametkaliyev, TM., Teresov, A., Koval, A., Pirozhkova, T., ... Surmenev, R. (2015). The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. In IOP Conference Series: Materials Science and Engineering (1 ed., Vol. 98). [012028] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/98/1/012028

The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. / Surmeneva, M.; Tyurin, A.; Mukhametkaliyev, Timur Mukhamedrashidovich; Teresov, A.; Koval, A.; Pirozhkova, T.; Shuvarin, I.; Chudinova, E.; Surmenev, R.

IOP Conference Series: Materials Science and Engineering. Vol. 98 1. ed. Institute of Physics Publishing, 2015. 012028.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surmeneva, M, Tyurin, A, Mukhametkaliyev, TM, Teresov, A, Koval, A, Pirozhkova, T, Shuvarin, I, Chudinova, E & Surmenev, R 2015, The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. in IOP Conference Series: Materials Science and Engineering. 1 edn, vol. 98, 012028, Institute of Physics Publishing, 3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology, Nanobiotech 2015, Tambov, Russian Federation, 21.5.15. https://doi.org/10.1088/1757-899X/98/1/012028
Surmeneva M, Tyurin A, Mukhametkaliyev TM, Teresov A, Koval A, Pirozhkova T et al. The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. In IOP Conference Series: Materials Science and Engineering. 1 ed. Vol. 98. Institute of Physics Publishing. 2015. 012028 https://doi.org/10.1088/1757-899X/98/1/012028
Surmeneva, M. ; Tyurin, A. ; Mukhametkaliyev, Timur Mukhamedrashidovich ; Teresov, A. ; Koval, A. ; Pirozhkova, T. ; Shuvarin, I. ; Chudinova, E. ; Surmenev, R. / The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. IOP Conference Series: Materials Science and Engineering. Vol. 98 1. ed. Institute of Physics Publishing, 2015.
@inproceedings{84af9e6ae0444f118b85f163f0a73183,
title = "The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam",
abstract = "Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.",
author = "M. Surmeneva and A. Tyurin and Timur Mukhamedrashidovich Mukhametkaliyev and A. Teresov and A. Koval and T. Pirozhkova and I. Shuvarin and E. Chudinova and R. Surmenev",
year = "2015",
month = "11",
day = "3",
doi = "10.1088/1757-899X/98/1/012028",
language = "English",
volume = "98",
booktitle = "IOP Conference Series: Materials Science and Engineering",
publisher = "Institute of Physics Publishing",
edition = "1",

}

TY - GEN

T1 - The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam

AU - Surmeneva, M.

AU - Tyurin, A.

AU - Mukhametkaliyev, Timur Mukhamedrashidovich

AU - Teresov, A.

AU - Koval, A.

AU - Pirozhkova, T.

AU - Shuvarin, I.

AU - Chudinova, E.

AU - Surmenev, R.

PY - 2015/11/3

Y1 - 2015/11/3

N2 - Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.

AB - Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.

UR - http://www.scopus.com/inward/record.url?scp=84960927773&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84960927773&partnerID=8YFLogxK

U2 - 10.1088/1757-899X/98/1/012028

DO - 10.1088/1757-899X/98/1/012028

M3 - Conference contribution

VL - 98

BT - IOP Conference Series: Materials Science and Engineering

PB - Institute of Physics Publishing

ER -