The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam

Abstract

Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca₁₀(PO₄)_6-x(SiO₄)_x(OH)_2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm². The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H³/E² than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.

Original language	English
Title of host publication	IOP Conference Series: Materials Science and Engineering
Publisher	Institute of Physics Publishing
Volume	98
Edition	1
DOIs	https://doi.org/10.1088/1757-899X/98/1/012028
Publication status	Published - 3 Nov 2015
Event	3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology, Nanobiotech 2015 - Tambov, Russian Federation Duration: 21 May 2015 → 22 May 2015

Other

Other	3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology, Nanobiotech 2015
Country	Russian Federation
City	Tambov
Period	21.5.15 → 22.5.15

ASJC Scopus subject areas

Engineering(all)
Materials Science(all)

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10.1088/1757-899X/98/1/012028

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Surmeneva, M., Tyurin, A., Mukhametkaliyev, TM., Teresov, A., Koval, A., Pirozhkova, T., Shuvarin, I., Chudinova, E., & Surmenev, R. (2015). The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. In IOP Conference Series: Materials Science and Engineering (1 ed., Vol. 98). [012028] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/98/1/012028

The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. / Surmeneva, M.; Tyurin, A.; Mukhametkaliyev, Timur Mukhamedrashidovich; Teresov, A.; Koval, A.; Pirozhkova, T.; Shuvarin, I.; Chudinova, E.; Surmenev, R.

IOP Conference Series: Materials Science and Engineering. Vol. 98 1. ed. Institute of Physics Publishing, 2015. 012028.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Surmeneva, M, Tyurin, A, Mukhametkaliyev, TM, Teresov, A, Koval, A, Pirozhkova, T, Shuvarin, I, Chudinova, E & Surmenev, R 2015, The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. in IOP Conference Series: Materials Science and Engineering. 1 edn, vol. 98, 012028, Institute of Physics Publishing, 3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology, Nanobiotech 2015, Tambov, Russian Federation, 21.5.15. https://doi.org/10.1088/1757-899X/98/1/012028

Surmeneva M, Tyurin A, Mukhametkaliyev TM, Teresov A, Koval A, Pirozhkova T et al. The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. In IOP Conference Series: Materials Science and Engineering. 1 ed. Vol. 98. Institute of Physics Publishing. 2015. 012028 https://doi.org/10.1088/1757-899X/98/1/012028

Surmeneva, M. ; Tyurin, A. ; Mukhametkaliyev, Timur Mukhamedrashidovich ; Teresov, A. ; Koval, A. ; Pirozhkova, T. ; Shuvarin, I. ; Chudinova, E. ; Surmenev, R. / The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam. IOP Conference Series: Materials Science and Engineering. Vol. 98 1. ed. Institute of Physics Publishing, 2015.

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abstract = "Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.",

author = "M. Surmeneva and A. Tyurin and Timur Mukhamedrashidovich Mukhametkaliyev and A. Teresov and A. Koval and T. Pirozhkova and I. Shuvarin and E. Chudinova and R. Surmenev",

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AU - Surmeneva, M.

AU - Tyurin, A.

AU - Mukhametkaliyev, Timur Mukhamedrashidovich

AU - Teresov, A.

AU - Koval, A.

AU - Pirozhkova, T.

AU - Shuvarin, I.

AU - Chudinova, E.

AU - Surmenev, R.

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N2 - Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.

AB - Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2 than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.

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