The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings

Artur Shugurov, Alexey Panin, Alexandr Akulinkin, Artur Kasterov, Mark Kalashnikov, Evgenii Kuzminov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

Original languageEnglish
Title of host publicationProceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
EditorsVasily M. Fomin, Victor E. Panin, Sergey G. Psakhie
PublisherAmerican Institute of Physics Inc.
Volume2051
ISBN (Electronic)9780735417779
DOIs
Publication statusPublished - 12 Dec 2018
EventInternational Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 - Tomsk, Russian Federation
Duration: 1 Oct 20185 Oct 2018

Conference

ConferenceInternational Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018
CountryRussian Federation
CityTomsk
Period1.10.185.10.18

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Shugurov, A., Panin, A., Akulinkin, A., Kasterov, A., Kalashnikov, M., & Kuzminov, E. (2018). The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. In V. M. Fomin, V. E. Panin, & S. G. Psakhie (Eds.), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures (Vol. 2051). [020283] American Institute of Physics Inc.. https://doi.org/10.1063/1.5083526