Abstract
The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.
Original language | English |
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Title of host publication | Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures |
Editors | Vasily M. Fomin, Victor E. Panin, Sergey G. Psakhie |
Publisher | American Institute of Physics Inc. |
Volume | 2051 |
ISBN (Electronic) | 9780735417779 |
DOIs | |
Publication status | Published - 12 Dec 2018 |
Event | International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 - Tomsk, Russian Federation Duration: 1 Oct 2018 → 5 Oct 2018 |
Conference
Conference | International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 |
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Country | Russian Federation |
City | Tomsk |
Period | 1.10.18 → 5.10.18 |
ASJC Scopus subject areas
- Physics and Astronomy(all)