Abstract
The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures |
| Editors | Vasily M. Fomin, Victor E. Panin, Sergey G. Psakhie |
| Publisher | American Institute of Physics Inc. |
| Volume | 2051 |
| ISBN (Electronic) | 9780735417779 |
| DOIs | |
| Publication status | Published - 12 Dec 2018 |
| Event | International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 - Tomsk, Russian Federation Duration: 1 Oct 2018 → 5 Oct 2018 |
Conference
| Conference | International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 1.10.18 → 5.10.18 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. / Shugurov, Artur; Panin, Alexey; Akulinkin, Alexandr; Kasterov, Artur; Kalashnikov, Mark; Kuzminov, Evgenii.
Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. ed. / Vasily M. Fomin; Victor E. Panin; Sergey G. Psakhie. Vol. 2051 American Institute of Physics Inc., 2018. 020283.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings
AU - Shugurov, Artur
AU - Panin, Alexey
AU - Akulinkin, Alexandr
AU - Kasterov, Artur
AU - Kalashnikov, Mark
AU - Kuzminov, Evgenii
PY - 2018/12/12
Y1 - 2018/12/12
N2 - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.
AB - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.
UR - http://www.scopus.com/inward/record.url?scp=85058984945&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85058984945&partnerID=8YFLogxK
U2 - 10.1063/1.5083526
DO - 10.1063/1.5083526
M3 - Conference contribution
AN - SCOPUS:85058984945
VL - 2051
BT - Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
A2 - Fomin, Vasily M.
A2 - Panin, Victor E.
A2 - Psakhie, Sergey G.
PB - American Institute of Physics Inc.
ER -