The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings

Abstract

The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

Original language	English
Title of host publication	Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
Editors	Vasily M. Fomin, Victor E. Panin, Sergey G. Psakhie
Publisher	American Institute of Physics Inc.
Volume	2051
ISBN (Electronic)	9780735417779
DOIs	https://doi.org/10.1063/1.5083526
Publication status	Published - 12 Dec 2018
Event	International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 - Tomsk, Russian Federation Duration: 1 Oct 2018 → 5 Oct 2018

Conference

Conference	International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018
Country	Russian Federation
City	Tomsk
Period	1.10.18 → 5.10.18

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.5083526

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Shugurov, A., Panin, A., Akulinkin, A., Kasterov, A., Kalashnikov, M., & Kuzminov, E. (2018). The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. In V. M. Fomin, V. E. Panin, & S. G. Psakhie (Eds.), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures (Vol. 2051). [020283] American Institute of Physics Inc.. https://doi.org/10.1063/1.5083526

The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. / Shugurov, Artur; Panin, Alexey; Akulinkin, Alexandr; Kasterov, Artur; Kalashnikov, Mark; Kuzminov, Evgenii.

Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. ed. / Vasily M. Fomin; Victor E. Panin; Sergey G. Psakhie. Vol. 2051 American Institute of Physics Inc., 2018. 020283.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shugurov, A, Panin, A, Akulinkin, A, Kasterov, A, Kalashnikov, M & Kuzminov, E 2018, The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. in VM Fomin, VE Panin & SG Psakhie (eds), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. vol. 2051, 020283, American Institute of Physics Inc., International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018, Tomsk, Russian Federation, 1.10.18. https://doi.org/10.1063/1.5083526

Shugurov A, Panin A, Akulinkin A, Kasterov A, Kalashnikov M, Kuzminov E. The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. In Fomin VM, Panin VE, Psakhie SG, editors, Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Vol. 2051. American Institute of Physics Inc. 2018. 020283 https://doi.org/10.1063/1.5083526

Shugurov, Artur ; Panin, Alexey ; Akulinkin, Alexandr ; Kasterov, Artur ; Kalashnikov, Mark ; Kuzminov, Evgenii. / The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. editor / Vasily M. Fomin ; Victor E. Panin ; Sergey G. Psakhie. Vol. 2051 American Institute of Physics Inc., 2018.

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abstract = "The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.",

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AU - Kalashnikov, Mark

AU - Kuzminov, Evgenii

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AB - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

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