The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings

Artur Shugurov, Alexey Panin, Alexandr Akulinkin, Artur Kasterov, Mark Kalashnikov, Evgenii Kuzminov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

Original languageEnglish
Title of host publicationProceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
EditorsVasily M. Fomin, Victor E. Panin, Sergey G. Psakhie
PublisherAmerican Institute of Physics Inc.
Volume2051
ISBN (Electronic)9780735417779
DOIs
Publication statusPublished - 12 Dec 2018
EventInternational Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 - Tomsk, Russian Federation
Duration: 1 Oct 20185 Oct 2018

Conference

ConferenceInternational Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018
CountryRussian Federation
CityTomsk
Period1.10.185.10.18

Fingerprint

mechanical properties
coatings
microstructure
partial pressure
nitrogen
nanoindentation
magnetron sputtering
titanium
scanning electron microscopy
temperature
diffraction
x rays

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Shugurov, A., Panin, A., Akulinkin, A., Kasterov, A., Kalashnikov, M., & Kuzminov, E. (2018). The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. In V. M. Fomin, V. E. Panin, & S. G. Psakhie (Eds.), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures (Vol. 2051). [020283] American Institute of Physics Inc.. https://doi.org/10.1063/1.5083526

The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. / Shugurov, Artur; Panin, Alexey; Akulinkin, Alexandr; Kasterov, Artur; Kalashnikov, Mark; Kuzminov, Evgenii.

Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. ed. / Vasily M. Fomin; Victor E. Panin; Sergey G. Psakhie. Vol. 2051 American Institute of Physics Inc., 2018. 020283.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shugurov, A, Panin, A, Akulinkin, A, Kasterov, A, Kalashnikov, M & Kuzminov, E 2018, The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. in VM Fomin, VE Panin & SG Psakhie (eds), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. vol. 2051, 020283, American Institute of Physics Inc., International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018, Tomsk, Russian Federation, 1.10.18. https://doi.org/10.1063/1.5083526
Shugurov A, Panin A, Akulinkin A, Kasterov A, Kalashnikov M, Kuzminov E. The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. In Fomin VM, Panin VE, Psakhie SG, editors, Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Vol. 2051. American Institute of Physics Inc. 2018. 020283 https://doi.org/10.1063/1.5083526
Shugurov, Artur ; Panin, Alexey ; Akulinkin, Alexandr ; Kasterov, Artur ; Kalashnikov, Mark ; Kuzminov, Evgenii. / The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. editor / Vasily M. Fomin ; Victor E. Panin ; Sergey G. Psakhie. Vol. 2051 American Institute of Physics Inc., 2018.
@inproceedings{5bbd5c38c16a4b519e5490611888fe59,
title = "The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings",
abstract = "The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.",
author = "Artur Shugurov and Alexey Panin and Alexandr Akulinkin and Artur Kasterov and Mark Kalashnikov and Evgenii Kuzminov",
year = "2018",
month = "12",
day = "12",
doi = "10.1063/1.5083526",
language = "English",
volume = "2051",
editor = "Fomin, {Vasily M.} and Panin, {Victor E.} and Psakhie, {Sergey G.}",
booktitle = "Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures",
publisher = "American Institute of Physics Inc.",

}

TY - GEN

T1 - The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings

AU - Shugurov, Artur

AU - Panin, Alexey

AU - Akulinkin, Alexandr

AU - Kasterov, Artur

AU - Kalashnikov, Mark

AU - Kuzminov, Evgenii

PY - 2018/12/12

Y1 - 2018/12/12

N2 - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

AB - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

UR - http://www.scopus.com/inward/record.url?scp=85058984945&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85058984945&partnerID=8YFLogxK

U2 - 10.1063/1.5083526

DO - 10.1063/1.5083526

M3 - Conference contribution

AN - SCOPUS:85058984945

VL - 2051

BT - Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures

A2 - Fomin, Vasily M.

A2 - Panin, Victor E.

A2 - Psakhie, Sergey G.

PB - American Institute of Physics Inc.

ER -