Abstract
The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with Zr/Al>1 and Zr/Al<1 were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate (θ=50mm) fixed to the magnetron cathode by a Zr fixing ring with inner diameter θ in . The content of Al in the Zr-Al-O film was controlled by θ in . It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline ZrO 2 phase and the amorphous Al 2 O 3 phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with Zr/Al<1 are X-ray amorphous and exhibit low hardness (H≤13GPa), an effective Young's modulus E * resulting in a low H/E * <0.1 ratio and low elastic recovery W e ≤60 and (ii) the Zr-Al-O films with Zr/Al>1 are crystalline and exhibit high hardness (H=18 to 19GPa), an E * satisfying a high H/E * ≥0.1 ratio, high W e up to 78% and strongly enhanced resistance to cracking during bending even for thick films up to 5μm.
| Original language | English |
|---|---|
| Pages (from-to) | 355-360 |
| Number of pages | 6 |
| Journal | Surface and Coatings Technology |
| Volume | 207 |
| DOIs | |
| Publication status | Published - 25 Aug 2012 |
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Keywords
- Mechanical properties
- Optical properties
- Reactive magnetron sputtering
- Resistance to cracking
- Structure
- Zr-Al-O film
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
The effect of addition of Al in ZrO 2 thin film on its resistance to cracking. / Musil, J.; Sklenka, J.; Čerstvý, R.; Suzuki, T.; Mori, T.; Takahashi, M.
In: Surface and Coatings Technology, Vol. 207, 25.08.2012, p. 355-360.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - The effect of addition of Al in ZrO 2 thin film on its resistance to cracking
AU - Musil, J.
AU - Sklenka, J.
AU - Čerstvý, R.
AU - Suzuki, T.
AU - Mori, T.
AU - Takahashi, M.
PY - 2012/8/25
Y1 - 2012/8/25
N2 - The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with Zr/Al>1 and Zr/Al<1 were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate (θ=50mm) fixed to the magnetron cathode by a Zr fixing ring with inner diameter θ in . The content of Al in the Zr-Al-O film was controlled by θ in . It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline ZrO 2 phase and the amorphous Al 2 O 3 phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with Zr/Al<1 are X-ray amorphous and exhibit low hardness (H≤13GPa), an effective Young's modulus E * resulting in a low H/E * <0.1 ratio and low elastic recovery W e ≤60 and (ii) the Zr-Al-O films with Zr/Al>1 are crystalline and exhibit high hardness (H=18 to 19GPa), an E * satisfying a high H/E * ≥0.1 ratio, high W e up to 78% and strongly enhanced resistance to cracking during bending even for thick films up to 5μm.
AB - The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with Zr/Al>1 and Zr/Al<1 were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate (θ=50mm) fixed to the magnetron cathode by a Zr fixing ring with inner diameter θ in . The content of Al in the Zr-Al-O film was controlled by θ in . It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline ZrO 2 phase and the amorphous Al 2 O 3 phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with Zr/Al<1 are X-ray amorphous and exhibit low hardness (H≤13GPa), an effective Young's modulus E * resulting in a low H/E * <0.1 ratio and low elastic recovery W e ≤60 and (ii) the Zr-Al-O films with Zr/Al>1 are crystalline and exhibit high hardness (H=18 to 19GPa), an E * satisfying a high H/E * ≥0.1 ratio, high W e up to 78% and strongly enhanced resistance to cracking during bending even for thick films up to 5μm.
KW - Mechanical properties
KW - Optical properties
KW - Reactive magnetron sputtering
KW - Resistance to cracking
KW - Structure
KW - Zr-Al-O film
UR - http://www.scopus.com/inward/record.url?scp=84865704020&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84865704020&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2012.07.017
DO - 10.1016/j.surfcoat.2012.07.017
M3 - Article
VL - 207
SP - 355
EP - 360
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -