The effect of addition of Al in ZrO 2 thin film on its resistance to cracking

J. Musil, J. Sklenka, R. Čerstvý, T. Suzuki, T. Mori, M. Takahashi

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with Zr/Al>1 and Zr/Al<1 were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate (θ=50mm) fixed to the magnetron cathode by a Zr fixing ring with inner diameter θ in . The content of Al in the Zr-Al-O film was controlled by θ in . It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline ZrO 2 phase and the amorphous Al 2 O 3 phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with Zr/Al<1 are X-ray amorphous and exhibit low hardness (H≤13GPa), an effective Young's modulus E * resulting in a low H/E * <0.1 ratio and low elastic recovery W e ≤60 and (ii) the Zr-Al-O films with Zr/Al>1 are crystalline and exhibit high hardness (H=18 to 19GPa), an E * satisfying a high H/E * ≥0.1 ratio, high W e up to 78% and strongly enhanced resistance to cracking during bending even for thick films up to 5μm.

Original languageEnglish
Pages (from-to)355-360
Number of pages6
JournalSurface and Coatings Technology
Volume207
DOIs
Publication statusPublished - 25 Aug 2012

Fingerprint

Thin films
thin films
Magnetrons
magnetrons
hardness
Optical properties
Hardness
mechanical properties
Crystalline materials
optical properties
Mechanical properties
Reactive sputtering
Thick films
fixing
thick films
modulus of elasticity
Cathodes
Elastic moduli
cathodes
sputtering

Keywords

  • Mechanical properties
  • Optical properties
  • Reactive magnetron sputtering
  • Resistance to cracking
  • Structure
  • Zr-Al-O film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

The effect of addition of Al in ZrO 2 thin film on its resistance to cracking. / Musil, J.; Sklenka, J.; Čerstvý, R.; Suzuki, T.; Mori, T.; Takahashi, M.

In: Surface and Coatings Technology, Vol. 207, 25.08.2012, p. 355-360.

Research output: Contribution to journalArticle

Musil, J. ; Sklenka, J. ; Čerstvý, R. ; Suzuki, T. ; Mori, T. ; Takahashi, M. / The effect of addition of Al in ZrO 2 thin film on its resistance to cracking. In: Surface and Coatings Technology. 2012 ; Vol. 207. pp. 355-360.
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