The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode

A. S. Grenadyorov, K. V. Oskomov, A. A. Solovyev, S. V. Rabotkin, N. F. Kovsharov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Silicon-carbon coatings on silicon substrates were deposited in plasma based nonselfsustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.

Original languageEnglish
Title of host publicationHigh Technology
Subtitle of host publicationResearch and Applications, 2015
PublisherTrans Tech Publications Ltd
Pages643-647
Number of pages5
ISBN (Print)9783038357087
DOIs
Publication statusPublished - 1 Jan 2016
Event4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation
Duration: 21 Apr 201524 Apr 2015

Publication series

NameKey Engineering Materials
Volume685
ISSN (Print)1013-9826

Conference

Conference4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015
CountryRussian Federation
CityTomsk
Period21.4.1524.4.15

Fingerprint

Silicon
Cathodes
Carbon
Plasmas
Coatings
Elastic moduli
Hardness
Plasma polymerization
Argon
Carbon films
Substrates
Bias voltage
Surface morphology
Surface roughness
Flow rate
Electric potential

Keywords

  • Diamond-like carbon
  • Polyphenyl methylsiloxane
  • Silicon-carbon films

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Grenadyorov, A. S., Oskomov, K. V., Solovyev, A. A., Rabotkin, S. V., & Kovsharov, N. F. (2016). The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode. In High Technology: Research and Applications, 2015 (pp. 643-647). (Key Engineering Materials; Vol. 685). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.685.643

The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode. / Grenadyorov, A. S.; Oskomov, K. V.; Solovyev, A. A.; Rabotkin, S. V.; Kovsharov, N. F.

High Technology: Research and Applications, 2015. Trans Tech Publications Ltd, 2016. p. 643-647 (Key Engineering Materials; Vol. 685).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Grenadyorov, AS, Oskomov, KV, Solovyev, AA, Rabotkin, SV & Kovsharov, NF 2016, The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode. in High Technology: Research and Applications, 2015. Key Engineering Materials, vol. 685, Trans Tech Publications Ltd, pp. 643-647, 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015, Tomsk, Russian Federation, 21.4.15. https://doi.org/10.4028/www.scientific.net/KEM.685.643
Grenadyorov AS, Oskomov KV, Solovyev AA, Rabotkin SV, Kovsharov NF. The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode. In High Technology: Research and Applications, 2015. Trans Tech Publications Ltd. 2016. p. 643-647. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.685.643
Grenadyorov, A. S. ; Oskomov, K. V. ; Solovyev, A. A. ; Rabotkin, S. V. ; Kovsharov, N. F. / The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode. High Technology: Research and Applications, 2015. Trans Tech Publications Ltd, 2016. pp. 643-647 (Key Engineering Materials).
@inproceedings{de8f4056b53541c2ba56663e577c132e,
title = "The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode",
abstract = "Silicon-carbon coatings on silicon substrates were deposited in plasma based nonselfsustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.",
keywords = "Diamond-like carbon, Polyphenyl methylsiloxane, Silicon-carbon films",
author = "Grenadyorov, {A. S.} and Oskomov, {K. V.} and Solovyev, {A. A.} and Rabotkin, {S. V.} and Kovsharov, {N. F.}",
year = "2016",
month = "1",
day = "1",
doi = "10.4028/www.scientific.net/KEM.685.643",
language = "English",
isbn = "9783038357087",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "643--647",
booktitle = "High Technology",

}

TY - GEN

T1 - The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode

AU - Grenadyorov, A. S.

AU - Oskomov, K. V.

AU - Solovyev, A. A.

AU - Rabotkin, S. V.

AU - Kovsharov, N. F.

PY - 2016/1/1

Y1 - 2016/1/1

N2 - Silicon-carbon coatings on silicon substrates were deposited in plasma based nonselfsustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.

AB - Silicon-carbon coatings on silicon substrates were deposited in plasma based nonselfsustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.

KW - Diamond-like carbon

KW - Polyphenyl methylsiloxane

KW - Silicon-carbon films

UR - http://www.scopus.com/inward/record.url?scp=84958212155&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84958212155&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/KEM.685.643

DO - 10.4028/www.scientific.net/KEM.685.643

M3 - Conference contribution

AN - SCOPUS:84958212155

SN - 9783038357087

T3 - Key Engineering Materials

SP - 643

EP - 647

BT - High Technology

PB - Trans Tech Publications Ltd

ER -