Temperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers

A. I. Ryabchikov, I. V. Lopatin, P. S. Ananin, G. A. Bleicher, A. I. Ivanova, T. V. Koval, G. S. Modebadze, D. O. Sivin

Research output: Contribution to journal › Conference article › peer-review

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Physics & Astronomy