Temperature error compensation in two-component microelectromechanical gyroscope

Abstract

This paper presents the design and simulation of a microelectromechanical gyroscope that simultaneously determines two components of angular velocity. In this device, the silicon sensor is started by an electrostatic actuator to perform a linear harmonic motion at a controlled speed. The movable masses of the sensor move in two directions, orthogonal to the primary vibrations of the sensor under the action of Coriolis forces. This paper considers how temperature influences eigenfrequencies and informative vibrational magnitudes of the micromechanical angular velocity sensor. The parameters that have the greatest impact on the sensor output behavior are determined by a finite-element analysis method. Techniques to stabilize vibration eigenfrequencies of the sensing element are suggested.

Original language	English
Article number	6881628
Pages (from-to)	1598-1605
Number of pages	8
Journal	IEEE Transactions on Components, Packaging and Manufacturing Technology
Volume	4
Issue number	10
DOIs	https://doi.org/10.1109/TCPMT.2014.2327958
Publication status	Published - 1 Oct 2014

Keywords

Electrostatic actuators
gyroscopes
microelectromechanical devices
temperature compensation
vibrations
vibrodrive

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Industrial and Manufacturing Engineering

Access to Document

10.1109/TCPMT.2014.2327958

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Cite this

Nesterenko, T. G., Koleda, AN., Barbin, E. S., & Uchaikin, S. V. (2014). Temperature error compensation in two-component microelectromechanical gyroscope. IEEE Transactions on Components, Packaging and Manufacturing Technology, 4(10), 1598-1605. [6881628]. https://doi.org/10.1109/TCPMT.2014.2327958

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