Temperature error compensation in two-component microelectromechanical gyroscope

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9 Citations (Scopus)

Abstract

This paper presents the design and simulation of a microelectromechanical gyroscope that simultaneously determines two components of angular velocity. In this device, the silicon sensor is started by an electrostatic actuator to perform a linear harmonic motion at a controlled speed. The movable masses of the sensor move in two directions, orthogonal to the primary vibrations of the sensor under the action of Coriolis forces. This paper considers how temperature influences eigenfrequencies and informative vibrational magnitudes of the micromechanical angular velocity sensor. The parameters that have the greatest impact on the sensor output behavior are determined by a finite-element analysis method. Techniques to stabilize vibration eigenfrequencies of the sensing element are suggested.

Original languageEnglish
Article number6881628
Pages (from-to)1598-1605
Number of pages8
JournalIEEE Transactions on Components, Packaging and Manufacturing Technology
Volume4
Issue number10
DOIs
Publication statusPublished - 1 Oct 2014

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Error compensation
Gyroscopes
Sensors
Angular velocity
Electrostatic actuators
Silicon sensors
Coriolis force
Temperature
Finite element method

Keywords

  • Electrostatic actuators
  • gyroscopes
  • microelectromechanical devices
  • temperature compensation
  • vibrations
  • vibrodrive

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering

Cite this

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AU - Uchaikin, Sergey V.

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AB - This paper presents the design and simulation of a microelectromechanical gyroscope that simultaneously determines two components of angular velocity. In this device, the silicon sensor is started by an electrostatic actuator to perform a linear harmonic motion at a controlled speed. The movable masses of the sensor move in two directions, orthogonal to the primary vibrations of the sensor under the action of Coriolis forces. This paper considers how temperature influences eigenfrequencies and informative vibrational magnitudes of the micromechanical angular velocity sensor. The parameters that have the greatest impact on the sensor output behavior are determined by a finite-element analysis method. Techniques to stabilize vibration eigenfrequencies of the sensing element are suggested.

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