Synthesis of multilayer polycrystalline diamond films using bias-induced secondary nucleation

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Abstract

We developed a new method for the synthesis of multilayer polycrystalline diamond films based on negative bias-induced secondary nucleation on a diamond surface induced by intense ion bombardment during CVD. The periodic formation of new nucleation centers and subsequent deposition allow us to synthesize films of up to 20 layers with a thickness up to 50 μm. The multilayer diamond films were characterized by SEM and XRD. Dependence of the nucleation density on the methane concentration and current density was investigated. This technique provides multilayer diamond films for a wide range of applications.

Original languageEnglish
Pages (from-to)389-392
Number of pages4
JournalMaterials Letters
Volume139
DOIs
Publication statusPublished - 15 Feb 2015

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Keywords

  • Carbon materials
  • Crystal growth
  • Multilayer structure
  • Thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

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