Synthesis and characterization of ZrO2 thin films

V. V. Kozik, L. P. Borilo, L. N. Borilo

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    Physicochemical processes involved in the preparation of zirconia thin films by sol-gel technology from film-forming solutions (FFSs) on the basis of zirconium oxochloride and ethanol were studied. The phase composition, structure, and properties of the films were determined.

    Original languageEnglish
    Pages (from-to)658-663
    Number of pages6
    JournalRussian Journal of Inorganic Chemistry
    Volume54
    Issue number5
    DOIs
    Publication statusPublished - May 2009

    Fingerprint

    Thin films
    synthesis
    thin films
    Phase composition
    Zirconium
    zirconium oxides
    Zirconia
    Sol-gels
    Ethanol
    ethyl alcohol
    gels
    preparation
    zirconium oxide

    ASJC Scopus subject areas

    • Inorganic Chemistry

    Cite this

    Synthesis and characterization of ZrO2 thin films. / Kozik, V. V.; Borilo, L. P.; Borilo, L. N.

    In: Russian Journal of Inorganic Chemistry, Vol. 54, No. 5, 05.2009, p. 658-663.

    Research output: Contribution to journalArticle

    Kozik, V. V. ; Borilo, L. P. ; Borilo, L. N. / Synthesis and characterization of ZrO2 thin films. In: Russian Journal of Inorganic Chemistry. 2009 ; Vol. 54, No. 5. pp. 658-663.
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