Synthesis and characterization of ZrO2 thin films

V. V. Kozik, L. P. Borilo, L. N. Borilo

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    1 Citation (Scopus)

    Abstract

    Physicochemical processes involved in the preparation of zirconia thin films by sol-gel technology from film-forming solutions (FFSs) on the basis of zirconium oxochloride and ethanol were studied. The phase composition, structure, and properties of the films were determined.

    Original languageEnglish
    Pages (from-to)658-663
    Number of pages6
    JournalRussian Journal of Inorganic Chemistry
    Volume54
    Issue number5
    DOIs
    Publication statusPublished - May 2009

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    ASJC Scopus subject areas

    • Inorganic Chemistry

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