Study of (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN films prepared by reactive magnetron sputtering

M. Braic, M. Balaceanu, A. Vladescu, C. N. Zoita, V. Braic

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

(Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN coatings, in which Ti, Hf and Nb were added to ZrCN base compound, have been prepared by reactive magnetron sputtering. The coatings, with two different non-metal/metal ratios, were comparatively investigated in terms of elemental and phase composition, texture, surface morphology, hardness and friction performance. It has been shown that the films exhibit nanocomposite structures, consisting of a mixture of crystalline metal carbonitride and amorphous carbon. As compared with ternary ZrCN coatings, the quaternary coatings were found to exhibit superior mechanical and friction characteristics. In general, the films with higher non-metal content revealed finer morphologies, higher hardness and lower friction coefficient. Depending on the coating type and non-metal/metal ratio, the hardness values ranged from about 21 to 29 GPa, being higher than those of ZrCN reference films. The coefficients of friction varied from 0.2 to 0.5, the lowest values being obtained for the coatings with the highest non-metal content.

Original languageEnglish
Pages (from-to)4092-4096
Number of pages5
JournalThin Solid Films
Volume519
Issue number12
DOIs
Publication statusPublished - 1 Apr 2011
Externally publishedYes

Fingerprint

Reactive sputtering
Magnetron sputtering
magnetron sputtering
coatings
Coatings
Friction
hardness
Metals
Hardness
coefficient of friction
friction
metals
Nanocomposite films
Carbon nitride
Amorphous carbon
Phase composition
Surface morphology
nanocomposites
textures
Textures

Keywords

  • (Zr,Hf)CN
  • (Zr,Nb)CN coatings
  • (Zr,Ti)CN
  • Composition and structure
  • Friction performance
  • Magnetron sputtering
  • Mechanical

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Study of (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN films prepared by reactive magnetron sputtering. / Braic, M.; Balaceanu, M.; Vladescu, A.; Zoita, C. N.; Braic, V.

In: Thin Solid Films, Vol. 519, No. 12, 01.04.2011, p. 4092-4096.

Research output: Contribution to journalArticle

Braic, M. ; Balaceanu, M. ; Vladescu, A. ; Zoita, C. N. ; Braic, V. / Study of (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN films prepared by reactive magnetron sputtering. In: Thin Solid Films. 2011 ; Vol. 519, No. 12. pp. 4092-4096.
@article{9a65fb27840248099c87204596c206f3,
title = "Study of (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN films prepared by reactive magnetron sputtering",
abstract = "(Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN coatings, in which Ti, Hf and Nb were added to ZrCN base compound, have been prepared by reactive magnetron sputtering. The coatings, with two different non-metal/metal ratios, were comparatively investigated in terms of elemental and phase composition, texture, surface morphology, hardness and friction performance. It has been shown that the films exhibit nanocomposite structures, consisting of a mixture of crystalline metal carbonitride and amorphous carbon. As compared with ternary ZrCN coatings, the quaternary coatings were found to exhibit superior mechanical and friction characteristics. In general, the films with higher non-metal content revealed finer morphologies, higher hardness and lower friction coefficient. Depending on the coating type and non-metal/metal ratio, the hardness values ranged from about 21 to 29 GPa, being higher than those of ZrCN reference films. The coefficients of friction varied from 0.2 to 0.5, the lowest values being obtained for the coatings with the highest non-metal content.",
keywords = "(Zr,Hf)CN, (Zr,Nb)CN coatings, (Zr,Ti)CN, Composition and structure, Friction performance, Magnetron sputtering, Mechanical",
author = "M. Braic and M. Balaceanu and A. Vladescu and Zoita, {C. N.} and V. Braic",
year = "2011",
month = "4",
day = "1",
doi = "10.1016/j.tsf.2011.01.375",
language = "English",
volume = "519",
pages = "4092--4096",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "12",

}

TY - JOUR

T1 - Study of (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN films prepared by reactive magnetron sputtering

AU - Braic, M.

AU - Balaceanu, M.

AU - Vladescu, A.

AU - Zoita, C. N.

AU - Braic, V.

PY - 2011/4/1

Y1 - 2011/4/1

N2 - (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN coatings, in which Ti, Hf and Nb were added to ZrCN base compound, have been prepared by reactive magnetron sputtering. The coatings, with two different non-metal/metal ratios, were comparatively investigated in terms of elemental and phase composition, texture, surface morphology, hardness and friction performance. It has been shown that the films exhibit nanocomposite structures, consisting of a mixture of crystalline metal carbonitride and amorphous carbon. As compared with ternary ZrCN coatings, the quaternary coatings were found to exhibit superior mechanical and friction characteristics. In general, the films with higher non-metal content revealed finer morphologies, higher hardness and lower friction coefficient. Depending on the coating type and non-metal/metal ratio, the hardness values ranged from about 21 to 29 GPa, being higher than those of ZrCN reference films. The coefficients of friction varied from 0.2 to 0.5, the lowest values being obtained for the coatings with the highest non-metal content.

AB - (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN coatings, in which Ti, Hf and Nb were added to ZrCN base compound, have been prepared by reactive magnetron sputtering. The coatings, with two different non-metal/metal ratios, were comparatively investigated in terms of elemental and phase composition, texture, surface morphology, hardness and friction performance. It has been shown that the films exhibit nanocomposite structures, consisting of a mixture of crystalline metal carbonitride and amorphous carbon. As compared with ternary ZrCN coatings, the quaternary coatings were found to exhibit superior mechanical and friction characteristics. In general, the films with higher non-metal content revealed finer morphologies, higher hardness and lower friction coefficient. Depending on the coating type and non-metal/metal ratio, the hardness values ranged from about 21 to 29 GPa, being higher than those of ZrCN reference films. The coefficients of friction varied from 0.2 to 0.5, the lowest values being obtained for the coatings with the highest non-metal content.

KW - (Zr,Hf)CN

KW - (Zr,Nb)CN coatings

KW - (Zr,Ti)CN

KW - Composition and structure

KW - Friction performance

KW - Magnetron sputtering

KW - Mechanical

UR - http://www.scopus.com/inward/record.url?scp=79953703402&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953703402&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2011.01.375

DO - 10.1016/j.tsf.2011.01.375

M3 - Article

AN - SCOPUS:79953703402

VL - 519

SP - 4092

EP - 4096

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 12

ER -