Study of the properties of a Si surface layer implanted with <sup>64</sup>Zn<sup>+</sup> and <sup>16</sup>O<sup>+</sup> ions during the formation of ZnO nanoparticles under thermal annealing

V. V. Privezentsev, V. S. Kulikauskas, V. V. Zatekin, D. V. Petrov, A. Yu Trifonov, A. A. Batrakov

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Engineering & Materials Science

Chemical Compounds