Study of the properties of a Si surface layer implanted with &lt;sup&gt;64&lt;/sup&gt;Zn&lt;sup&gt;+&lt;/sup&gt; and &lt;sup&gt;16&lt;/sup&gt;O&lt;sup&gt;+&lt;/sup&gt; ions during the formation of ZnO nanoparticles under thermal annealing

Abstract

The cross section of a Si surface layer implanted with 64Zn+ and 16O+ ions is visualized via high-resolution transmission electron microscopy, and its evolution as a result of thermal annealing is investigated. The profiles of impurities implanted into this layer, which are measured by means of secondary-ion mass spectrometry, as well as their changes arising from heat treatment, are analyzed. The surface morphology is examined with the help of atomic-force microscopy.

Original language	English
Pages (from-to)	486-495
Number of pages	10
Journal	Journal of Surface Investigation
Volume	9
Issue number	3
DOIs	https://doi.org/10.1134/S1027451015020160
Publication status	Published - 8 May 2015

Keywords

ion implantation
nanoparticles
silicon
zinc
zinc oxide

ASJC Scopus subject areas

Surfaces, Coatings and Films

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10.1134/S1027451015020160

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Privezentsev, V. V., Kulikauskas, V. S., Zatekin, V. V., Petrov, D. V., Trifonov, A. Y., & Batrakov, A. A. (2015). Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. Journal of Surface Investigation, 9(3), 486-495. https://doi.org/10.1134/S1027451015020160

Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. / Privezentsev, V. V.; Kulikauskas, V. S.; Zatekin, V. V.; Petrov, D. V.; Trifonov, A. Yu; Batrakov, A. A.

In: Journal of Surface Investigation, Vol. 9, No. 3, 08.05.2015, p. 486-495.

Research output: Contribution to journal › Article › peer-review

Privezentsev, VV, Kulikauskas, VS, Zatekin, VV, Petrov, DV, Trifonov, AY & Batrakov, AA 2015, 'Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing', Journal of Surface Investigation, vol. 9, no. 3, pp. 486-495. https://doi.org/10.1134/S1027451015020160

Privezentsev VV, Kulikauskas VS, Zatekin VV, Petrov DV, Trifonov AY, Batrakov AA. Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. Journal of Surface Investigation. 2015 May 8;9(3):486-495. https://doi.org/10.1134/S1027451015020160

Privezentsev, V. V. ; Kulikauskas, V. S. ; Zatekin, V. V. ; Petrov, D. V. ; Trifonov, A. Yu ; Batrakov, A. A. / Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. In: Journal of Surface Investigation. 2015 ; Vol. 9, No. 3. pp. 486-495.

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AU - Trifonov, A. Yu

AU - Batrakov, A. A.

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Study of the properties of a Si surface layer implanted with <sup>64</sup>Zn<sup>+</sup> and <sup>16</sup>O<sup>+</sup> ions during the formation of ZnO nanoparticles under thermal annealing

Abstract

Keywords

ASJC Scopus subject areas

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Fingerprint Dive into the research topics of 'Study of the properties of a Si surface layer implanted with <sup>64</sup>Zn<sup>+</sup> and <sup>16</sup>O<sup>+</sup> ions during the formation of ZnO nanoparticles under thermal annealing'. Together they form a unique fingerprint.

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