Study of the properties of a Si surface layer implanted with &lt;sup&gt;64&lt;/sup&gt;Zn&lt;sup&gt;+&lt;/sup&gt; and &lt;sup&gt;16&lt;/sup&gt;O&lt;sup&gt;+&lt;/sup&gt; ions during the formation of ZnO nanoparticles under thermal annealing

Abstract

The cross section of a Si surface layer implanted with 64Zn+ and 16O+ ions is visualized via high-resolution transmission electron microscopy, and its evolution as a result of thermal annealing is investigated. The profiles of impurities implanted into this layer, which are measured by means of secondary-ion mass spectrometry, as well as their changes arising from heat treatment, are analyzed. The surface morphology is examined with the help of atomic-force microscopy.

Original language	English
Pages (from-to)	486-495
Number of pages	10
Journal	Journal of Surface Investigation
Volume	9
Issue number	3
DOIs	https://doi.org/10.1134/S1027451015020160
Publication status	Published - 8 May 2015

Keywords

ion implantation
nanoparticles
silicon
zinc
zinc oxide

ASJC Scopus subject areas

Surfaces, Coatings and Films

Access to Document

10.1134/S1027451015020160

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Privezentsev, V. V., Kulikauskas, V. S., Zatekin, V. V., Petrov, D. V., Trifonov, A. Y., & Batrakov, A. A. (2015). Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. Journal of Surface Investigation, 9(3), 486-495. https://doi.org/10.1134/S1027451015020160

Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. / Privezentsev, V. V.; Kulikauskas, V. S.; Zatekin, V. V.; Petrov, D. V.; Trifonov, A. Yu; Batrakov, A. A.

In: Journal of Surface Investigation, Vol. 9, No. 3, 08.05.2015, p. 486-495.

Research output: Contribution to journal › Article › peer-review

Privezentsev, VV, Kulikauskas, VS, Zatekin, VV, Petrov, DV, Trifonov, AY & Batrakov, AA 2015, 'Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing', Journal of Surface Investigation, vol. 9, no. 3, pp. 486-495. https://doi.org/10.1134/S1027451015020160

Privezentsev VV, Kulikauskas VS, Zatekin VV, Petrov DV, Trifonov AY, Batrakov AA. Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. Journal of Surface Investigation. 2015 May 8;9(3):486-495. https://doi.org/10.1134/S1027451015020160

Privezentsev, V. V. ; Kulikauskas, V. S. ; Zatekin, V. V. ; Petrov, D. V. ; Trifonov, A. Yu ; Batrakov, A. A. / Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing. In: Journal of Surface Investigation. 2015 ; Vol. 9, No. 3. pp. 486-495.

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Study of the properties of a Si surface layer implanted with <sup>64</sup>Zn<sup>+</sup> and <sup>16</sup>O<sup>+</sup> ions during the formation of ZnO nanoparticles under thermal annealing

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint Dive into the research topics of 'Study of the properties of a Si surface layer implanted with <sup>64</sup>Zn<sup>+</sup> and <sup>16</sup>O<sup>+</sup> ions during the formation of ZnO nanoparticles under thermal annealing'. Together they form a unique fingerprint.

Cite this