Study of luminescent properties of Al-Si-N films

B. P. Gritsenko, V. F. Shtan'Ko, S. A. Stepanov, G. Zh Nogaibekova, V. P. Sergeev

Division for Materials Science

Research output: Contribution to journal › Conference article

Abstract

In this study, we analyzed the optical properties of Ai-Si-N coatings applied on silica glass. Under the effect of optical radiation and electron beam, intense luminescence of Al-Si-N films with complex emission spectra is observed. Photoluminescence excited by the radiation with energy of 4.47 eV, which falls within the opaque range of the films, is likely connected with surface luminescence centers. The film luminescence demonstrates that luminescence spectra excited in different ways do not coincide. This indicates that there are different luminescence centers in Al-Si-N films. These centers are excited with different efficiency at different types of excitation.

Original language	English
Article number	052003
Journal	Journal of Physics: Conference Series
Volume	1115
Issue number	5
DOIs	https://doi.org/10.1088/1742-6596/1115/5/052003
Publication status	Published - 27 Nov 2018
Event	6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation Duration: 16 Sep 2018 → 22 Sep 2018

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ASJC Scopus subject areas

Physics and Astronomy(all)

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Gritsenko, B. P., Shtan'Ko, V. F., Stepanov, S. A., Nogaibekova, G. Z., & Sergeev, V. P. (2018). Study of luminescent properties of Al-Si-N films. Journal of Physics: Conference Series, 1115(5), [052003]. https://doi.org/10.1088/1742-6596/1115/5/052003

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abstract = "In this study, we analyzed the optical properties of Ai-Si-N coatings applied on silica glass. Under the effect of optical radiation and electron beam, intense luminescence of Al-Si-N films with complex emission spectra is observed. Photoluminescence excited by the radiation with energy of 4.47 eV, which falls within the opaque range of the films, is likely connected with surface luminescence centers. The film luminescence demonstrates that luminescence spectra excited in different ways do not coincide. This indicates that there are different luminescence centers in Al-Si-N films. These centers are excited with different efficiency at different types of excitation.",

author = "Gritsenko, {B. P.} and Shtan'Ko, {V. F.} and Stepanov, {S. A.} and Nogaibekova, {G. Zh} and Sergeev, {V. P.}",

year = "2018",

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AU - Gritsenko, B. P.

AU - Shtan'Ko, V. F.

AU - Stepanov, S. A.

AU - Nogaibekova, G. Zh

AU - Sergeev, V. P.

PY - 2018/11/27

Y1 - 2018/11/27

N2 - In this study, we analyzed the optical properties of Ai-Si-N coatings applied on silica glass. Under the effect of optical radiation and electron beam, intense luminescence of Al-Si-N films with complex emission spectra is observed. Photoluminescence excited by the radiation with energy of 4.47 eV, which falls within the opaque range of the films, is likely connected with surface luminescence centers. The film luminescence demonstrates that luminescence spectra excited in different ways do not coincide. This indicates that there are different luminescence centers in Al-Si-N films. These centers are excited with different efficiency at different types of excitation.

AB - In this study, we analyzed the optical properties of Ai-Si-N coatings applied on silica glass. Under the effect of optical radiation and electron beam, intense luminescence of Al-Si-N films with complex emission spectra is observed. Photoluminescence excited by the radiation with energy of 4.47 eV, which falls within the opaque range of the films, is likely connected with surface luminescence centers. The film luminescence demonstrates that luminescence spectra excited in different ways do not coincide. This indicates that there are different luminescence centers in Al-Si-N films. These centers are excited with different efficiency at different types of excitation.

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JO - Journal of Physics: Conference Series

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10.1088/1742-6596/1115/5/052003