Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering

R. Kužel, L. Nichtová, Z. Matěj, D. Heřman, J. Šícha, J. Musil

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Crystallization of a set of magnetron deposited TiO2 thin films with different thickness in the range of 54 - 2000 nm has been studied by X-ray scattering. Phase analysis, lattice parameters and X-ray line broadening were studied by X-ray powder diffraction in parallel beam optics, the residual stresses were measured with the aid of the Eulerian cradle and surface roughness determined by X-ray reflectivity measurement. As-deposited films were amorphous. They were annealed at different temperatures and found to be crystalline after annealing at 250°C except the thinnest films which crystallized at higher temperatures.

Original languageEnglish
Pages (from-to)247-252
Number of pages6
JournalZeitschrift fur Kristallographie, Supplement
Volume2
Issue number26
Publication statusPublished - 1 Dec 2007

Fingerprint

Crystallization
X ray scattering
crystallization
X rays
Thin films
Amorphous films
thin films
scattering
X ray powder diffraction
Lattice constants
Residual stresses
Optics
x rays
Surface roughness
Annealing
Crystalline materials
Temperature
residual stress
lattice parameters
surface roughness

Keywords

  • Crystallization
  • Thin films
  • Titanium oxide
  • X-ray diffraction

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Inorganic Chemistry

Cite this

Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering. / Kužel, R.; Nichtová, L.; Matěj, Z.; Heřman, D.; Šícha, J.; Musil, J.

In: Zeitschrift fur Kristallographie, Supplement, Vol. 2, No. 26, 01.12.2007, p. 247-252.

Research output: Contribution to journalArticle

Kužel, R, Nichtová, L, Matěj, Z, Heřman, D, Šícha, J & Musil, J 2007, 'Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering', Zeitschrift fur Kristallographie, Supplement, vol. 2, no. 26, pp. 247-252.
Kužel, R. ; Nichtová, L. ; Matěj, Z. ; Heřman, D. ; Šícha, J. ; Musil, J. / Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering. In: Zeitschrift fur Kristallographie, Supplement. 2007 ; Vol. 2, No. 26. pp. 247-252.
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