Structure of Zr - Y - O layer in Zr Y O / Si Al N-based multilayer coatings

Marina Fedorischeva, Victor Sergeev, Mark Kalashnikov, Andrew Voronov, Natalja Popova

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

TEM research of the structure of multilayered coatings consisting of alternating layers Si- Al-N and Zr-Y-O of equal thickness was carried out. It was shown that boundaries between different layers were the sharp enough, and the chemical composition in each layer was homogeneous. The phase composition of the layers on the basis of Zr-Y-O contained basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N, contained partially amorphous, and partially nanocrystalline Si3N4.

Original languageEnglish
Title of host publicationStructure and Properties of Metals at Different Energy Effects and Treatment Technologies
EditorsVasilii A. Klimenov, Aleksandr V. Starenchenko, Vasilii A. Klimenov, Aleksandr V. Starenchenko, Vasilii A. Klimenov, Vasilii A. Klimenov
PublisherTrans Tech Publications Ltd
Pages200-204
Number of pages5
ISBN (Electronic)9783038351917, 9783038351917
DOIs
Publication statusPublished - 2014
EventInternational Scientific Workshop Structure and Properties of Metals at Different Energy Effects and Treatment Technologies - Tomsk, Russian Federation
Duration: 29 Sep 201430 Sep 2014

Publication series

NameAdvanced Materials Research
Volume1013
ISSN (Print)1022-6680
ISSN (Electronic)1662-8985

Other

OtherInternational Scientific Workshop Structure and Properties of Metals at Different Energy Effects and Treatment Technologies
CountryRussian Federation
CityTomsk
Period29.9.1430.9.14

Keywords

  • Curvature-torsion
  • Grain size
  • Magnetron deposition
  • Microstructure
  • Multilayer heat-shielding coatings
  • Phase composition

ASJC Scopus subject areas

  • Engineering(all)

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