Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering

Maxim Evgenievich Konishchev, O. S. Kuzmin, A. A. Pustovalova, N. S. Morozova, K. E. Evdokimov, R. A. Surmenev, V. F. Pichugin, M. Epple

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.

Original languageEnglish
Pages (from-to)1144-1149
Number of pages6
JournalRussian Physics Journal
Volume56
Issue number10
DOIs
Publication statusPublished - Feb 2014

Fingerprint

magnetron sputtering
oxynitrides
coatings
titanium oxides
titanium
gas discharges
wetting
surface energy
stainless steels
examination
infrared spectroscopy
deposits
transmission electron microscopy
scanning electron microscopy
synthesis
spectroscopy

Keywords

  • optical spectroscopy
  • Reactive magnetron sputtering
  • surface energy
  • titanium oxides and titanium oxynitrides
  • wettability

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering. / Konishchev, Maxim Evgenievich; Kuzmin, O. S.; Pustovalova, A. A.; Morozova, N. S.; Evdokimov, K. E.; Surmenev, R. A.; Pichugin, V. F.; Epple, M.

In: Russian Physics Journal, Vol. 56, No. 10, 02.2014, p. 1144-1149.

Research output: Contribution to journalArticle

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AU - Morozova, N. S.

AU - Evdokimov, K. E.

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