Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering

Abstract

Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.

Original language	English
Pages (from-to)	1144-1149
Number of pages	6
Journal	Russian Physics Journal
Volume	56
Issue number	10
DOIs	https://doi.org/10.1007/s11182-014-0154-5
Publication status	Published - Feb 2014

Keywords

optical spectroscopy
Reactive magnetron sputtering
surface energy
titanium oxides and titanium oxynitrides
wettability

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1007/s11182-014-0154-5

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Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering. / Konishchev, Maxim Evgenievich; Kuzmin, O. S.; Pustovalova, A. A.; Morozova, N. S.; Evdokimov, K. E.; Surmenev, R. A.; Pichugin, V. F.; Epple, M.

In: Russian Physics Journal, Vol. 56, No. 10, 02.2014, p. 1144-1149.

Research output: Contribution to journal › Article › peer-review

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abstract = "Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.",

keywords = "optical spectroscopy, Reactive magnetron sputtering, surface energy, titanium oxides and titanium oxynitrides, wettability",

author = "Konishchev, {Maxim Evgenievich} and Kuzmin, {O. S.} and Pustovalova, {A. A.} and Morozova, {N. S.} and Evdokimov, {K. E.} and Surmenev, {R. A.} and Pichugin, {V. F.} and M. Epple",

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AU - Konishchev, Maxim Evgenievich

AU - Kuzmin, O. S.

AU - Pustovalova, A. A.

AU - Morozova, N. S.

AU - Evdokimov, K. E.

AU - Surmenev, R. A.

AU - Pichugin, V. F.

AU - Epple, M.

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AB - Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.

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KW - titanium oxides and titanium oxynitrides

KW - wettability

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