Abstract
Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.
| Original language | English |
|---|---|
| Pages (from-to) | 1144-1149 |
| Number of pages | 6 |
| Journal | Russian Physics Journal |
| Volume | 56 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Feb 2014 |
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Keywords
- optical spectroscopy
- Reactive magnetron sputtering
- surface energy
- titanium oxides and titanium oxynitrides
- wettability
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering. / Konishchev, Maxim Evgenievich; Kuzmin, O. S.; Pustovalova, A. A.; Morozova, N. S.; Evdokimov, K. E.; Surmenev, R. A.; Pichugin, V. F.; Epple, M.
In: Russian Physics Journal, Vol. 56, No. 10, 02.2014, p. 1144-1149.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering
AU - Konishchev, Maxim Evgenievich
AU - Kuzmin, O. S.
AU - Pustovalova, A. A.
AU - Morozova, N. S.
AU - Evdokimov, K. E.
AU - Surmenev, R. A.
AU - Pichugin, V. F.
AU - Epple, M.
PY - 2014/2
Y1 - 2014/2
N2 - Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.
AB - Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti-O-N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.
KW - optical spectroscopy
KW - Reactive magnetron sputtering
KW - surface energy
KW - titanium oxides and titanium oxynitrides
KW - wettability
UR - http://www.scopus.com/inward/record.url?scp=84893841236&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84893841236&partnerID=8YFLogxK
U2 - 10.1007/s11182-014-0154-5
DO - 10.1007/s11182-014-0154-5
M3 - Article
AN - SCOPUS:84893841236
VL - 56
SP - 1144
EP - 1149
JO - Russian Physics Journal
JF - Russian Physics Journal
SN - 1064-8887
IS - 10
ER -