Structure and properties of the Ti-Si-N nanocrystalline coatings synthesized in vacuum by the electroarc method

N. N. Koval, Yu F. Ivanov, I. M. Goncharenko, O. V. Krysina, Yu A. Kolubaeva, K. A. Koshkin

Research output: Contribution to journalArticle

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Abstract

Phase composition, defect substructure, and mechanical properties of the Ti-Si-N coating deposited on metal and ceramic-metal substrates by electroarc sputtering of the Ti-Si composite cathode in an ionized nitrogen atmosphere are investigated by the methods of modern materials science. It is established that coatings so formed with a thickness of ∼ 1-3 μm are superhard (H v ∼ 50 GPa), and have the nanocrystalline structure (with crystalline sizes D = 7 nm) based on titanium nitride δ-TiN.

Original languageEnglish
Pages (from-to)146-152
Number of pages7
JournalRussian Physics Journal
Volume50
Issue number2
DOIs
Publication statusPublished - 1 Feb 2007

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coatings
nanostructure (characteristics)
vacuum
titanium nitrides
materials science
substructures
metals
cathodes
sputtering
mechanical properties
ceramics
nitrogen
atmospheres
composite materials
defects

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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Structure and properties of the Ti-Si-N nanocrystalline coatings synthesized in vacuum by the electroarc method. / Koval, N. N.; Ivanov, Yu F.; Goncharenko, I. M.; Krysina, O. V.; Kolubaeva, Yu A.; Koshkin, K. A.

In: Russian Physics Journal, Vol. 50, No. 2, 01.02.2007, p. 146-152.

Research output: Contribution to journalArticle

Koval, N. N. ; Ivanov, Yu F. ; Goncharenko, I. M. ; Krysina, O. V. ; Kolubaeva, Yu A. ; Koshkin, K. A. / Structure and properties of the Ti-Si-N nanocrystalline coatings synthesized in vacuum by the electroarc method. In: Russian Physics Journal. 2007 ; Vol. 50, No. 2. pp. 146-152.
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