Structure and properties of the Ti-Si-N nanocrystalline coatings synthesized in vacuum by the electroarc method

N. N. Koval, Yu F. Ivanov, I. M. Goncharenko, O. V. Krysina, Yu A. Kolubaeva, K. A. Koshkin

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Phase composition, defect substructure, and mechanical properties of the Ti-Si-N coating deposited on metal and ceramic-metal substrates by electroarc sputtering of the Ti-Si composite cathode in an ionized nitrogen atmosphere are investigated by the methods of modern materials science. It is established that coatings so formed with a thickness of ∼ 1-3 μm are superhard (H v ∼ 50 GPa), and have the nanocrystalline structure (with crystalline sizes D = 7 nm) based on titanium nitride δ-TiN.

Original languageEnglish
Pages (from-to)146-152
Number of pages7
JournalRussian Physics Journal
Issue number2
Publication statusPublished - 1 Feb 2007


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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