Structure and properties of nanocomposite Nb-Al-N films

V. I. Ivashchenko, A. D. Pogrebnjak, O. V. Sobol’, P. L. Skrynskii, V. N. Rogoz, A. A. Meilekhov, S. N. Dub, A. I. Kupchishin

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Abstract

Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbN_z and B1-Nb_{1 − x}Al_xN_yO_{1 − y}, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbN_z and Nb₂AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.

Original language	English
Pages (from-to)	1642-1646
Number of pages	5
Journal	Physics of the Solid State
Volume	57
Issue number	8
DOIs	https://doi.org/10.1134/S1063783415080089
Publication status	Published - 4 Aug 2015
Externally published	Yes

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ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Cite this

Ivashchenko, V. I., Pogrebnjak, A. D., Sobol’, O. V., Skrynskii, P. L., Rogoz, V. N., Meilekhov, A. A., ... Kupchishin, A. I. (2015). Structure and properties of nanocomposite Nb-Al-N films. Physics of the Solid State, 57(8), 1642-1646. https://doi.org/10.1134/S1063783415080089

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abstract = "Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.",

author = "Ivashchenko, {V. I.} and Pogrebnjak, {A. D.} and Sobol’, {O. V.} and Skrynskii, {P. L.} and Rogoz, {V. N.} and Meilekhov, {A. A.} and Dub, {S. N.} and Kupchishin, {A. I.}",

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T1 - Structure and properties of nanocomposite Nb-Al-N films

AU - Ivashchenko, V. I.

AU - Pogrebnjak, A. D.

AU - Sobol’, O. V.

AU - Skrynskii, P. L.

AU - Rogoz, V. N.

AU - Meilekhov, A. A.

AU - Dub, S. N.

AU - Kupchishin, A. I.

PY - 2015/8/4

Y1 - 2015/8/4

N2 - Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.

AB - Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.

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10.1134/S1063783415080089