Abstract
Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.
| Original language | English |
|---|---|
| Pages (from-to) | 1642-1646 |
| Number of pages | 5 |
| Journal | Physics of the Solid State |
| Volume | 57 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 4 Aug 2015 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
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Structure and properties of nanocomposite Nb-Al-N films. / Ivashchenko, V. I.; Pogrebnjak, A. D.; Sobol’, O. V.; Skrynskii, P. L.; Rogoz, V. N.; Meilekhov, A. A.; Dub, S. N.; Kupchishin, A. I.
In: Physics of the Solid State, Vol. 57, No. 8, 04.08.2015, p. 1642-1646.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Structure and properties of nanocomposite Nb-Al-N films
AU - Ivashchenko, V. I.
AU - Pogrebnjak, A. D.
AU - Sobol’, O. V.
AU - Skrynskii, P. L.
AU - Rogoz, V. N.
AU - Meilekhov, A. A.
AU - Dub, S. N.
AU - Kupchishin, A. I.
PY - 2015/8/4
Y1 - 2015/8/4
N2 - Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.
AB - Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.
UR - http://www.scopus.com/inward/record.url?scp=84938304633&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84938304633&partnerID=8YFLogxK
U2 - 10.1134/S1063783415080089
DO - 10.1134/S1063783415080089
M3 - Article
VL - 57
SP - 1642
EP - 1646
JO - Physics of the Solid State
JF - Physics of the Solid State
SN - 1063-7834
IS - 8
ER -