Structure and phase analysis of fine powder materials produced by target sputtering with power pulsed beam

Yu F. Ivanov, G. E. Remnev, V. A. Makeev

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Using the TEM methods, the morphology, granulometry, angle distribution, defect structure and phase composition of powder materials synthesized by metal targets sputtering with ion beam have been investigated. Dependencies of average size, density and volume portion of powder fraction on angle divergence were established. The possible mechanisms of formation of powder particles of different shape are discussed.

Original languageEnglish
Pages (from-to)62-67
Number of pages6
JournalFizika i Khimiya Obrabotki Materialov
Issue number3
Publication statusPublished - 2001

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Powders
Sputtering
Defect structures
Phase composition
Ion beams
Metals
Transmission electron microscopy

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

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abstract = "Using the TEM methods, the morphology, granulometry, angle distribution, defect structure and phase composition of powder materials synthesized by metal targets sputtering with ion beam have been investigated. Dependencies of average size, density and volume portion of powder fraction on angle divergence were established. The possible mechanisms of formation of powder particles of different shape are discussed.",
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AU - Remnev, G. E.

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