Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation

M. V. Fedorischeva, A. V. Nikonenko, M. P. Kalashnikov, I. A. Bozhko, V. P. Sergeev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °C for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °C after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019
EditorsVictor E. Panin, Sergey G. Psakhie, Vasily M. Fomin
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735419124
DOIs
Publication statusPublished - 19 Nov 2019
EventInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 - Tomsk, Russian Federation
Duration: 1 Oct 20195 Oct 2019

Publication series

NameAIP Conference Proceedings
Volume2167
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

ConferenceInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019
CountryRussian Federation
CityTomsk
Period1.10.195.10.19

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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    Fedorischeva, M. V., Nikonenko, A. V., Kalashnikov, M. P., Bozhko, I. A., & Sergeev, V. P. (2019). Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. In V. E. Panin, S. G. Psakhie, & V. M. Fomin (Eds.), Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 [020096] (AIP Conference Proceedings; Vol. 2167). American Institute of Physics Inc.. https://doi.org/10.1063/1.5131963