Structural phase changes in a titanium-silicon system modified by high-current electron beams and compression plasma flows

Vladimir Vasilevich Uglov, N. T. Kvasov, Yu A. Petukhov, R. S. Kudaktin, N. N. Koval', Yu F. Ivanov, A. D. Teresov, V. M. Astashinskii, A. M. Kuz'mitskii

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Abstract

Structural phase changes in a titanium-silicon system treated by low-energy high-current electron beams (HCEBs) and compression plasma flows (CPFs) with the duration 100 μs and the energy density 12-15 J/cm 2 are studied. Scanning electron microscopy, X-ray diffraction and electron microprobe analysis are used in this work. The formation of a titanium-doped silicon layer 10-25 μm thick, titanium silicides (TiSi 2 under HCEBs and Ti 5Si 3 under CPF treatment), silicon dendrites, and needle-like eutectics (typical size of precipitates is about 50 nm) is revealed. It is shown via the results of numerical simulation that the thickness of the metal-doped layer is mainly controlled by the power density value and the surface nonuniformity of the heat flow over the target surface. The thermodynamic regularities of phase formation are discussed, taking into account heat transfer between the silicide nuclei and solid silicon.

Original languageEnglish
Pages (from-to)296-302
Number of pages7
JournalJournal of Surface Investigation
Volume6
Issue number2
DOIs
Publication statusPublished - 1 Apr 2012

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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    Uglov, V. V., Kvasov, N. T., Petukhov, Y. A., Kudaktin, R. S., Koval', N. N., Ivanov, Y. F., Teresov, A. D., Astashinskii, V. M., & Kuz'mitskii, A. M. (2012). Structural phase changes in a titanium-silicon system modified by high-current electron beams and compression plasma flows. Journal of Surface Investigation, 6(2), 296-302. https://doi.org/10.1134/S1027451012040180