Abstract
Structural phase changes in a titanium-silicon system treated by low-energy high-current electron beams (HCEBs) and compression plasma flows (CPFs) with the duration 100 μs and the energy density 12-15 J/cm 2 are studied. Scanning electron microscopy, X-ray diffraction and electron microprobe analysis are used in this work. The formation of a titanium-doped silicon layer 10-25 μm thick, titanium silicides (TiSi 2 under HCEBs and Ti 5Si 3 under CPF treatment), silicon dendrites, and needle-like eutectics (typical size of precipitates is about 50 nm) is revealed. It is shown via the results of numerical simulation that the thickness of the metal-doped layer is mainly controlled by the power density value and the surface nonuniformity of the heat flow over the target surface. The thermodynamic regularities of phase formation are discussed, taking into account heat transfer between the silicide nuclei and solid silicon.
| Original language | English |
|---|---|
| Pages (from-to) | 296-302 |
| Number of pages | 7 |
| Journal | Journal of Surface Investigation |
| Volume | 6 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1 Apr 2012 |
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ASJC Scopus subject areas
- Surfaces, Coatings and Films
Cite this
Structural phase changes in a titanium-silicon system modified by high-current electron beams and compression plasma flows. / Uglov, Vladimir Vasilevich; Kvasov, N. T.; Petukhov, Yu A.; Kudaktin, R. S.; Koval', N. N.; Ivanov, Yu F.; Teresov, A. D.; Astashinskii, V. M.; Kuz'mitskii, A. M.
In: Journal of Surface Investigation, Vol. 6, No. 2, 01.04.2012, p. 296-302.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Structural phase changes in a titanium-silicon system modified by high-current electron beams and compression plasma flows
AU - Uglov, Vladimir Vasilevich
AU - Kvasov, N. T.
AU - Petukhov, Yu A.
AU - Kudaktin, R. S.
AU - Koval', N. N.
AU - Ivanov, Yu F.
AU - Teresov, A. D.
AU - Astashinskii, V. M.
AU - Kuz'mitskii, A. M.
PY - 2012/4/1
Y1 - 2012/4/1
N2 - Structural phase changes in a titanium-silicon system treated by low-energy high-current electron beams (HCEBs) and compression plasma flows (CPFs) with the duration 100 μs and the energy density 12-15 J/cm 2 are studied. Scanning electron microscopy, X-ray diffraction and electron microprobe analysis are used in this work. The formation of a titanium-doped silicon layer 10-25 μm thick, titanium silicides (TiSi 2 under HCEBs and Ti 5Si 3 under CPF treatment), silicon dendrites, and needle-like eutectics (typical size of precipitates is about 50 nm) is revealed. It is shown via the results of numerical simulation that the thickness of the metal-doped layer is mainly controlled by the power density value and the surface nonuniformity of the heat flow over the target surface. The thermodynamic regularities of phase formation are discussed, taking into account heat transfer between the silicide nuclei and solid silicon.
AB - Structural phase changes in a titanium-silicon system treated by low-energy high-current electron beams (HCEBs) and compression plasma flows (CPFs) with the duration 100 μs and the energy density 12-15 J/cm 2 are studied. Scanning electron microscopy, X-ray diffraction and electron microprobe analysis are used in this work. The formation of a titanium-doped silicon layer 10-25 μm thick, titanium silicides (TiSi 2 under HCEBs and Ti 5Si 3 under CPF treatment), silicon dendrites, and needle-like eutectics (typical size of precipitates is about 50 nm) is revealed. It is shown via the results of numerical simulation that the thickness of the metal-doped layer is mainly controlled by the power density value and the surface nonuniformity of the heat flow over the target surface. The thermodynamic regularities of phase formation are discussed, taking into account heat transfer between the silicide nuclei and solid silicon.
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U2 - 10.1134/S1027451012040180
DO - 10.1134/S1027451012040180
M3 - Article
VL - 6
SP - 296
EP - 302
JO - Journal of Surface Investigation
JF - Journal of Surface Investigation
SN - 1027-4510
IS - 2
ER -