Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge

V. F. Pichugin, A. A. Pustovalova, K. E. Evdokimov, M. E. Konishchev, O. S. Kuzmin, E. L. Boytsova, Nataliia Beshchasna, Anton Ficai, D. M. Aubakirova, Zhilei Sun

Research School of High-Energy Physics

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.

Original language	English
Article number	012062
Journal	Journal of Physics: Conference Series
Volume	1281
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/1281/1/012062
Publication status	Published - 12 Aug 2019
Event	14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation Duration: 14 May 2019 → 16 May 2019

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1088/1742-6596/1281/1/012062

Fingerprint Dive into the research topics of 'Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge'. Together they form a unique fingerprint.

Cite this

Pichugin, V. F., Pustovalova, A. A., Evdokimov, K. E., Konishchev, M. E., Kuzmin, O. S., Boytsova, E. L., Beshchasna, N., Ficai, A., Aubakirova, D. M., & Sun, Z. (2019). Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge. Journal of Physics: Conference Series, 1281(1), [012062]. https://doi.org/10.1088/1742-6596/1281/1/012062

Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge. / Pichugin, V. F.; Pustovalova, A. A.; Evdokimov, K. E.; Konishchev, M. E.; Kuzmin, O. S.; Boytsova, E. L.; Beshchasna, Nataliia; Ficai, Anton; Aubakirova, D. M.; Sun, Zhilei.

In: Journal of Physics: Conference Series, Vol. 1281, No. 1, 012062, 12.08.2019.

Research output: Contribution to journal › Conference article › peer-review

@article{35357a912cf645f895cd9dfa45b76913,

title = "Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge",

abstract = "The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.",

author = "Pichugin, {V. F.} and Pustovalova, {A. A.} and Evdokimov, {K. E.} and Konishchev, {M. E.} and Kuzmin, {O. S.} and Boytsova, {E. L.} and Nataliia Beshchasna and Anton Ficai and Aubakirova, {D. M.} and Zhilei Sun",

year = "2019",

month = aug,

day = "12",

doi = "10.1088/1742-6596/1281/1/012062",

language = "English",

volume = "1281",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "1",

note = "14th International Conference on Films and Coatings, ICFC 2019 ; Conference date: 14-05-2019 Through 16-05-2019",

}

TY - JOUR

T1 - Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge

AU - Pichugin, V. F.

AU - Pustovalova, A. A.

AU - Evdokimov, K. E.

AU - Konishchev, M. E.

AU - Kuzmin, O. S.

AU - Boytsova, E. L.

AU - Beshchasna, Nataliia

AU - Ficai, Anton

AU - Aubakirova, D. M.

AU - Sun, Zhilei

PY - 2019/8/12

Y1 - 2019/8/12

N2 - The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.

AB - The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.

UR - http://www.scopus.com/inward/record.url?scp=85072163703&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85072163703&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1281/1/012062

DO - 10.1088/1742-6596/1281/1/012062

M3 - Conference article

AN - SCOPUS:85072163703

VL - 1281

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012062

T2 - 14th International Conference on Films and Coatings, ICFC 2019

Y2 - 14 May 2019 through 16 May 2019

ER -