Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge

V. F. Pichugin, A. A. Pustovalova, K. E. Evdokimov, M. E. Konishchev, O. S. Kuzmin, E. L. Boytsova, Nataliia Beshchasna, Anton Ficai, D. M. Aubakirova, Zhilei Sun

Research School of High-Energy Physics

Research output: Contribution to journal › Conference article

Abstract

The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.

Original language	English
Article number	012062
Journal	Journal of Physics: Conference Series
Volume	1281
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/1281/1/012062
Publication status	Published - 12 Aug 2019
Event	14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation Duration: 14 May 2019 → 16 May 2019

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ASJC Scopus subject areas

Physics and Astronomy(all)

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Pichugin, V. F., Pustovalova, A. A., Evdokimov, K. E., Konishchev, M. E., Kuzmin, O. S., Boytsova, E. L., ... Sun, Z. (2019). Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge. Journal of Physics: Conference Series, 1281(1), [012062]. https://doi.org/10.1088/1742-6596/1281/1/012062

Structural features and nitrogen positions in titanium oxynitride films grown in plasma of magnetron discharge. / Pichugin, V. F.; Pustovalova, A. A.; Evdokimov, K. E.; Konishchev, M. E.; Kuzmin, O. S.; Boytsova, E. L.; Beshchasna, Nataliia; Ficai, Anton; Aubakirova, D. M.; Sun, Zhilei.

In: Journal of Physics: Conference Series, Vol. 1281, No. 1, 012062, 12.08.2019.

Research output: Contribution to journal › Conference article

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abstract = "The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.",

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AU - Konishchev, M. E.

AU - Kuzmin, O. S.

AU - Boytsova, E. L.

AU - Beshchasna, Nataliia

AU - Ficai, Anton

AU - Aubakirova, D. M.

AU - Sun, Zhilei

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AB - The paper addresses the results of the analysis of the structural features of nitrogen-containing titanium oxides films, deposited by reactive magnetron sputtering. The films have a nanocrystalline two-phase structure and consist of anatase and rutile crystallites, regardless of the coating deposition regimes. No traces of titanium nitride phase are found in the film and nitrogen atoms in oxide form are localized at the grain boundaries of the deposited film.

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10.1088/1742-6596/1281/1/012062