The results are given for experimental studies of the structural-phase state formed in the surface and near-surface layers of a disordered polycrystalline Ni3Fe alloy during high-dose ion implantation. The studies used Auger electron spectroscopy, transmission electron microscopy, x-ray structural analysis, and microhardness measurements. The ion implantation was done using the "Raduga" vacuum arc source with a multicomponent cathode of composition Zr (89.5 wt. %) + C + N + O with an acceleration voltage of 50kV. The implanted ion dose was varied in the range (6.0·1016-6.0·1017) ions/cm2. It was established that in the surface layer which is alloyed during ion implantation there is amorphization with simultaneous formation of finely dispersed ZrO2 particles whose dimensions increase with increasing implanted ion dose; this is accompanied by an increased internal mechanical stress. Beyond the ion-implanted layer a sublayer about 10 μm thick with a high dislocation density is formed (the "long-range action" effect). The results of microhardness measurements correlate with the data from structural studies.
ASJC Scopus subject areas
- Physics and Astronomy(all)