Structural and phase state of Ti surface layers modified by high-intensity implantation of Al ions

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The elemental composition, the structural and phase state, and the mechanical properties of Ti surface layers modified by implantation of Al ions using a Raduga-5 vacuum arc ion and plasma source were investigated. It was established that ion-implanted surface layers of Ti contain fine-grained intermetallic phases (TiAl, Ti3Al) and a solid solution of Al in Ti with a composition inhomogeneous in depth. It was found that an increase in the implantation dose from 6.2·1017 to 2.2·1018 ion·cm-2 leads to the increase in the thickness of the implanted Ti layer from 1.6 to 2.6 μm and the average size of intermetallic grains (from 32 to 70 nm) and their conglomerates (from 70 to 584 nm). It was shown that the microhardness of Al-implanted surface layers of Ti exceeds that of the initial target material.

Original languageEnglish
Pages (from-to)1121-1126
Number of pages6
JournalBulletin of the Russian Academy of Sciences: Physics
Issue number7
Publication statusPublished - 2006


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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