Numerical simulations and experimental studies of surface and subsurface layers of different materials are performed in order to determine their real temperatures as a function of the regimes of high-intensity ion irradiation. The integral temperature of the target is measured using an electrically insulated thermocouple. A KLEIBER 740-LO high-temperature pulsed pyrometer is used to measure the dynamic variation of the local temperature. A contribution from the shock-wave mechanism into the mass transfer of the implanted impurity is studied during hot high-intensity ion implantation.
- deep ion alloying
- ion beam of high pulsed power density
- ion implantation
- radiation stimulated diffusion
- vacuum arc plasma
ASJC Scopus subject areas
- Physics and Astronomy(all)