Special Aspects of High-Intensity Low-Energy Ion Implantation

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Abstract

Numerical simulations and experimental studies of surface and subsurface layers of different materials are performed in order to determine their real temperatures as a function of the regimes of high-intensity ion irradiation. The integral temperature of the target is measured using an electrically insulated thermocouple. A KLEIBER 740-LO high-temperature pulsed pyrometer is used to measure the dynamic variation of the local temperature. A contribution from the shock-wave mechanism into the mass transfer of the implanted impurity is studied during hot high-intensity ion implantation.

Original languageEnglish
JournalRussian Physics Journal
DOIs
Publication statusAccepted/In press - 2021

Keywords

  • deep ion alloying
  • ion beam of high pulsed power density
  • ion implantation
  • radiation stimulated diffusion
  • vacuum arc plasma

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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