Some regularities of modification of the real silicon surface by electrochemically activated solutions of sulfuric acid

N. N. Nikitenkov, E. E. Chernova, Yu A. Karbainov, N. M. Markova, T. I. Khakhanina

Research output: Contribution to journalArticle

Abstract

The effect of electrochemically activated solutions of sulfuric acid on the state of the real surface of technological silicon plates is studied. It is shown that the most intense change in the zone of surface states occurs for the first 10 min of the interaction. The authors believe that the treatment of the silicon surface by chemically activated solutions of sulfuric acid results in chemical modification of the real surface, but not in deep cleaning.

Original languageEnglish
Pages (from-to)1275-1280
Number of pages6
JournalSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume12
Issue number11
Publication statusPublished - 1997

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Silicon
sulfuric acid
Sulfuric acid
regularity
silicon
Chemical modification
Surface states
Cleaning
cleaning
interactions

ASJC Scopus subject areas

  • Surfaces and Interfaces

Cite this

Some regularities of modification of the real silicon surface by electrochemically activated solutions of sulfuric acid. / Nikitenkov, N. N.; Chernova, E. E.; Karbainov, Yu A.; Markova, N. M.; Khakhanina, T. I.

In: Surface Investigation X-Ray, Synchrotron and Neutron Techniques, Vol. 12, No. 11, 1997, p. 1275-1280.

Research output: Contribution to journalArticle

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