Some regularities of modification of the real silicon surface by electrochemically activated solutions of sulfuric acid

N. N. Nikitenkov, E. E. Chernova, Yu A. Karbainov, N. M. Markova, T. I. Khakhanina

Research output: Contribution to journalArticle

Abstract

The effect of electrochemically activated solutions of sulfuric acid on the state of the real surface of technological silicon plates is studied. It is shown that the most intense change in the zone of surface states occurs for the first 10 min of the interaction. The authors believe that the treatment of the silicon surface by chemically activated solutions of sulfuric acid results in chemical modification of the real surface, but not in deep cleaning.

Original languageEnglish
Pages (from-to)1275-1280
Number of pages6
JournalSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume12
Issue number11
Publication statusPublished - 1997

ASJC Scopus subject areas

  • Surfaces and Interfaces

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