Small-sized KrCl-, XeCl- And XeBr-excilamps

M. V. Erofeev, N. L. Medvedev, E. A. Sosnin, V. F. Tarasenko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Simple configuration small-sized KrCl-, XeBr- and XeCl-excilamps based on near-surface capacitive discharge are offered. The devices are demonstrated to possess high specific energy characteristics (radiation power density of up to 10 mW/cm2), permanently small radiation volume, as well as narrow radiation band. Operating lifetime of a sealed-off excilamp is above 1000 hrs.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.F. Tarasenko, G.V. Mayer, G.G. Petrash
Pages335-339
Number of pages5
Volume5483
DOIs
Publication statusPublished - 2004
EventAtomic and Molecular Pulsed Lasers V - Tomsk, Russian Federation
Duration: 15 Sep 200319 Sep 2003

Other

OtherAtomic and Molecular Pulsed Lasers V
CountryRussian Federation
CityTomsk
Period15.9.0319.9.03

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Erofeev, M. V., Medvedev, N. L., Sosnin, E. A., & Tarasenko, V. F. (2004). Small-sized KrCl-, XeCl- And XeBr-excilamps. In V. F. Tarasenko, G. V. Mayer, & G. G. Petrash (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5483, pp. 335-339) https://doi.org/10.1117/12.563013