Small-sized KrCl-, XeCl- And XeBr-excilamps

M. V. Erofeev, N. L. Medvedev, E. A. Sosnin, V. F. Tarasenko

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Simple configuration small-sized KrCl-, XeBr- and XeCl-excilamps based on near-surface capacitive discharge are offered. The devices are demonstrated to possess high specific energy characteristics (radiation power density of up to 10 mW/cm2), permanently small radiation volume, as well as narrow radiation band. Operating lifetime of a sealed-off excilamp is above 1000 hrs.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.F. Tarasenko, G.V. Mayer, G.G. Petrash
Number of pages5
Publication statusPublished - 2004
EventAtomic and Molecular Pulsed Lasers V - Tomsk, Russian Federation
Duration: 15 Sep 200319 Sep 2003


OtherAtomic and Molecular Pulsed Lasers V
CountryRussian Federation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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