Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization

Marco Bestetti, Cristiano R. Marra, Mauro Leoncini, Alessandro Tocchio, Francesco Rizzini, Giacomo Langfelder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages704-707
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - Jan 2019
Externally publishedYes
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 27 Jan 201931 Jan 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period27.1.1931.1.19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Bestetti, M., Marra, C. R., Leoncini, M., Tocchio, A., Rizzini, F., & Langfelder, G. (2019). Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 704-707). [8870845] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870845