Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization

Abstract

A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	704-707
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870845
Publication status	Published - Jan 2019
Externally published	Yes
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country	Korea, Republic of
City	Seoul
Period	27.1.19 → 31.1.19

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2019.8870845

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Cite this

Bestetti, M., Marra, C. R., Leoncini, M., Tocchio, A., Rizzini, F., & Langfelder, G. (2019). Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 704-707). [8870845] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870845

Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization. / Bestetti, Marco; Marra, Cristiano R.; Leoncini, Mauro; Tocchio, Alessandro; Rizzini, Francesco; Langfelder, Giacomo.

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 704-707 8870845 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bestetti, M, Marra, CR, Leoncini, M, Tocchio, A, Rizzini, F & Langfelder, G 2019, Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870845, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 704-707, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 27.1.19. https://doi.org/10.1109/MEMSYS.2019.8870845

Bestetti M, Marra CR, Leoncini M, Tocchio A, Rizzini F, Langfelder G. Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 704-707. 8870845. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2019.8870845

Bestetti, Marco ; Marra, Cristiano R. ; Leoncini, Mauro ; Tocchio, Alessandro ; Rizzini, Francesco ; Langfelder, Giacomo. / Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 704-707 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{ef03df6158bb4f4eac1943d0b2110a1a,

title = "Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization",

abstract = "A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.",

author = "Marco Bestetti and Marra, {Cristiano R.} and Mauro Leoncini and Alessandro Tocchio and Francesco Rizzini and Giacomo Langfelder",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870845",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "704--707",

booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

address = "United States",

note = "32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

}

TY - GEN

T1 - Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization

AU - Bestetti, Marco

AU - Marra, Cristiano R.

AU - Leoncini, Mauro

AU - Tocchio, Alessandro

AU - Rizzini, Francesco

AU - Langfelder, Giacomo

PY - 2019/1

Y1 - 2019/1

N2 - A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.

AB - A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.

UR - http://www.scopus.com/inward/record.url?scp=85068589654&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85068589654&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2019.8870845

DO - 10.1109/MEMSYS.2019.8870845

M3 - Conference contribution

AN - SCOPUS:85068589654

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 704

EP - 707

BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019

Y2 - 27 January 2019 through 31 January 2019

ER -