TY - GEN
T1 - Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency Digitization
AU - Bestetti, Marco
AU - Marra, Cristiano R.
AU - Leoncini, Mauro
AU - Tocchio, Alessandro
AU - Rizzini, Francesco
AU - Langfelder, Giacomo
PY - 2019/1
Y1 - 2019/1
N2 - A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.
AB - A new operational mode of a frequency-modulated (FM) accelerometer for simultaneously improved full-scale, stability and bandwidth is presented. The system relies on a continuous sinusoidal modulation of the electromechanical configuration of a single resonator, which gradually reverses the sign of its frequency sensing: as a consequence, a secondary amplitude-modulation (AM) is superimposed to the primary FM effect. The following demodulations automatically cancel temperature-related drifts of the resonator frequency. The accelerometer is coupled to an integrated circuit that embeds an analog oscillator and a frequency digitization stage, with an overall consumption of 148\ \mu\mathrm{A}. A sub-80-μg/K drift coefficient and, at the same time, a sub-0.25% linearity error over 42 g of input acceleration are demonstrated. The achievable bandwidth is half of the chosen AM modulation frequency.
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U2 - 10.1109/MEMSYS.2019.8870845
DO - 10.1109/MEMSYS.2019.8870845
M3 - Conference contribution
AN - SCOPUS:85068589654
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 704
EP - 707
BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Y2 - 27 January 2019 through 31 January 2019
ER -