Simulation of the redistribution of ions in ion-magnetron setup

Elmir Saifullin, Anna Knyazeva

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, some features of ion redistribution in the chamber of ion-magnetron setup were studied numerically. The hydrodynamic model of two-component fully ionized plasma was taken as the basis for model construction. The assumed simplifications allowed dividing the problem into "electrical" and "hydrodynamic" parts. In term of "electrical" part of the problem, the distributions of electrical potentials and electric field intensity in the chamber were calculated. "Hydrodynamic" part includes the determination of the fields of the velocity components, pressure and concentration. It was shown that the electric field leads to the quantitative and qualitative changes in the process characteristics.

Original languageEnglish
Title of host publicationAdvanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
PublisherAmerican Institute of Physics Inc.
Volume1783
ISBN (Electronic)9780735414457
DOIs
Publication statusPublished - 10 Nov 2016
EventInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 - Tomsk, Russian Federation
Duration: 19 Sep 201623 Sep 2016

Conference

ConferenceInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
CountryRussian Federation
CityTomsk
Period19.9.1623.9.16

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Saifullin, E., & Knyazeva, A. (2016). Simulation of the redistribution of ions in ion-magnetron setup. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 (Vol. 1783). [020193] American Institute of Physics Inc.. https://doi.org/10.1063/1.4966487