SIMS and RBS investigations of implanted layers

V. M. Zavodchikov, N. N. Nikitenkov, L. N. Puchkaryova, A. A. Yatis

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Niobium and ARMCO iron were implanted with nanosecond pulses of 0.4-0.6 MeV carbon ions and niobium and beryllium with microsecond pulses of 80 keV tungsten ions. The implanted samples were investigated by Secondary Ion Mass Spectrometry (SIMS) and Rutherford back-scattering (RBS). A surface layer of 500-1000 Å in thickness has been found to differ from that of the unirradiated targets by a higher content of foreign and bulk impurities as well as in the values of the surface-binding energy A and the electron work function θ{symbol}. Pulse implantation of carbon has been found to result in formation of laminated structure in iron through the whole analyzed depth of ≈ 5 μm with interchanging carbide and austenite layers. A method for calculation of the unknown parameters A and θ{symbol} based on SIMS energy spectra is further presented.

Original languageEnglish
Pages (from-to)62-65
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume17
Issue number1
DOIs
Publication statusPublished - 1986

Fingerprint

Niobium
Secondary ion mass spectrometry
secondary ion mass spectrometry
Carbon
Iron
Scattering
Ions
Beryllium
niobium
Tungsten
pulses
Binding energy
scattering
Austenite
Carbides
iron
carbon
Impurities
beryllium
austenite

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

SIMS and RBS investigations of implanted layers. / Zavodchikov, V. M.; Nikitenkov, N. N.; Puchkaryova, L. N.; Yatis, A. A.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 17, No. 1, 1986, p. 62-65.

Research output: Contribution to journalArticle

Zavodchikov, V. M. ; Nikitenkov, N. N. ; Puchkaryova, L. N. ; Yatis, A. A. / SIMS and RBS investigations of implanted layers. In: Nuclear Inst. and Methods in Physics Research, B. 1986 ; Vol. 17, No. 1. pp. 62-65.
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