TY - JOUR
T1 - SIMS and RBS investigations of implanted layers
AU - Zavodchikov, V. M.
AU - Nikitenkov, N. N.
AU - Puchkaryova, L. N.
AU - Yatis, A. A.
PY - 1986
Y1 - 1986
N2 - Niobium and ARMCO iron were implanted with nanosecond pulses of 0.4-0.6 MeV carbon ions and niobium and beryllium with microsecond pulses of 80 keV tungsten ions. The implanted samples were investigated by Secondary Ion Mass Spectrometry (SIMS) and Rutherford back-scattering (RBS). A surface layer of 500-1000 Å in thickness has been found to differ from that of the unirradiated targets by a higher content of foreign and bulk impurities as well as in the values of the surface-binding energy A and the electron work function θ{symbol}. Pulse implantation of carbon has been found to result in formation of laminated structure in iron through the whole analyzed depth of ≈ 5 μm with interchanging carbide and austenite layers. A method for calculation of the unknown parameters A and θ{symbol} based on SIMS energy spectra is further presented.
AB - Niobium and ARMCO iron were implanted with nanosecond pulses of 0.4-0.6 MeV carbon ions and niobium and beryllium with microsecond pulses of 80 keV tungsten ions. The implanted samples were investigated by Secondary Ion Mass Spectrometry (SIMS) and Rutherford back-scattering (RBS). A surface layer of 500-1000 Å in thickness has been found to differ from that of the unirradiated targets by a higher content of foreign and bulk impurities as well as in the values of the surface-binding energy A and the electron work function θ{symbol}. Pulse implantation of carbon has been found to result in formation of laminated structure in iron through the whole analyzed depth of ≈ 5 μm with interchanging carbide and austenite layers. A method for calculation of the unknown parameters A and θ{symbol} based on SIMS energy spectra is further presented.
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U2 - 10.1016/0168-583X(86)90453-2
DO - 10.1016/0168-583X(86)90453-2
M3 - Article
AN - SCOPUS:0022766696
VL - 17
SP - 62
EP - 65
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1
ER -