Simple way of fabrication of Epoxy Novolak Resin optical waveguides on silicon substrate

Vaclav Prajzler, Oleksiy Lyutakov, Ivan Huttel, Jiri Barna, Jarmila Spirkova, Palva Nekvindova, Vitezslav Jerabek

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In this paper we report about design, fabrication and properties of the polymer optical waveguides deposited on silica-on-silicon substrate. The design of the waveguides is based on a concept that geometric dimensions of the single mode polymer waveguide are determined by geometrical parameters of the silica layer. The design of the waveguides was schemed for 650 nm, 850 nm, 1310 nm and 1550 nm wavelength. The design of the presented planar waveguides was realized on the bases of modified dispersion equation while the ridge waveguides design was proposed following the Fischbeck concept. Both designs were refined applying RSoft software using beam propagation method. Proposed shapes of the waveguides were etched by standard photolithography process into the silica layers and polymer waveguide layers were subsequently deposited into the treated substrate by spin coating. Epoxy Novolak Resin was used as the waveguide core material and polymethylmethacrylate was used as a cover protection layer. Propagation optical loss measurements were done by using the cut-back method. The best samples had optical losses lower than 1.5 dB/cm at 650 nm and 0.5 dB/cm at 1310 nm.

Original languageEnglish
Pages (from-to)2942-2945
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume8
Issue number9
DOIs
Publication statusPublished - 1 Sep 2011
Externally publishedYes

Fingerprint

epoxy resins
optical waveguides
waveguides
fabrication
silicon
silicon dioxide
polymers
propagation
photolithography
coating
ridges
computer programs
wavelengths

Keywords

  • Epoxy novolak resin
  • Polymer
  • Waveguide

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Simple way of fabrication of Epoxy Novolak Resin optical waveguides on silicon substrate. / Prajzler, Vaclav; Lyutakov, Oleksiy; Huttel, Ivan; Barna, Jiri; Spirkova, Jarmila; Nekvindova, Palva; Jerabek, Vitezslav.

In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 8, No. 9, 01.09.2011, p. 2942-2945.

Research output: Contribution to journalArticle

Prajzler, Vaclav ; Lyutakov, Oleksiy ; Huttel, Ivan ; Barna, Jiri ; Spirkova, Jarmila ; Nekvindova, Palva ; Jerabek, Vitezslav. / Simple way of fabrication of Epoxy Novolak Resin optical waveguides on silicon substrate. In: Physica Status Solidi (C) Current Topics in Solid State Physics. 2011 ; Vol. 8, No. 9. pp. 2942-2945.
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