Sensitivity improvement techniques for micromechanical vibrating accelerometers

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Abstract

The paper presents the problems of detecting a desired signal generated by micromechanical vibrating accelerometer. Three detection methods, namely frequency, amplitude and phase are considered in this paper. These methods are used in micromechanical vibrating accelerometers that incorporate a force sensitive element which transforms measured acceleration into the output signal. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results include the comparative analysis of the output signal characteristics obtained by the different detection methods.

Original language	English
Article number	02002
Journal	MATEC Web of Conferences
Volume	48
DOIs	https://doi.org/10.1051/confmatec/20164802002
Publication status	Published - 4 Apr 2016
Event	4th Russian Forum for Young Scientists with International Participation "Space Engineering" 2016 - Tomsk, Russian Federation Duration: 12 Apr 2016 → 14 Apr 2016

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ASJC Scopus subject areas

Chemistry(all)
Engineering(all)
Materials Science(all)

Cite this

Vtorushin, S., & Nesterenko, T. (2016). Sensitivity improvement techniques for micromechanical vibrating accelerometers. MATEC Web of Conferences, 48, [02002]. https://doi.org/10.1051/confmatec/20164802002

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abstract = "The paper presents the problems of detecting a desired signal generated by micromechanical vibrating accelerometer. Three detection methods, namely frequency, amplitude and phase are considered in this paper. These methods are used in micromechanical vibrating accelerometers that incorporate a force sensitive element which transforms measured acceleration into the output signal. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results include the comparative analysis of the output signal characteristics obtained by the different detection methods.",

author = "Sergey Vtorushin and Tamara Nesterenko",

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AB - The paper presents the problems of detecting a desired signal generated by micromechanical vibrating accelerometer. Three detection methods, namely frequency, amplitude and phase are considered in this paper. These methods are used in micromechanical vibrating accelerometers that incorporate a force sensitive element which transforms measured acceleration into the output signal. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results include the comparative analysis of the output signal characteristics obtained by the different detection methods.

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Access to Document

10.1051/confmatec/20164802002