Self-supporting tantalum masks for deep X-ray lithography with synchrotron radiation

S. V. Litvin, V. G. Kanaev, E. G. Larionova, N. V. Glazunova, L. P. Gromova, V. I. Yurchenko, N. A. Timchenko, L. A. Mezentseva, V. P. Nazmov, V. F. Pindyurin

Research output: Chapter in Book/Report/Conference proceedingChapter

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Engineering & Materials Science

Physics & Astronomy