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Self-supporting tantalum masks for deep X-ray lithography with synchrotron radiation
S. V. Litvin, V. G. Kanaev, E. G. Larionova, N. V. Glazunova, L. P. Gromova, V. I. Yurchenko, N. A. Timchenko, L. A. Mezentseva, V. P. Nazmov, V. F. Pindyurin
Research output: Chapter in Book/Report/Conference proceeding › Chapter