Abstract
Kinetics dependencies of electrical conduction of dielectrics irradiated with ions after influence ozone in air were considered. Possibility of the creation an ozone-sensitive elements on the base modified by ions BN and SiO2 was showed.
Original language | English |
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Title of host publication | 8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004 |
Pages | 182-184 |
Number of pages | 3 |
Volume | 2 |
Publication status | Published - 2004 |
Event | 8th Korea-Russia International Symposium on Science and Technology, KORUS 2004 - Tomsk, Russian Federation Duration: 26 Jun 2004 → 3 Jul 2004 |
Other
Other | 8th Korea-Russia International Symposium on Science and Technology, KORUS 2004 |
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Country | Russian Federation |
City | Tomsk |
Period | 26.6.04 → 3.7.04 |
Keywords
- Dielectric
- Modify surface
- Ozone measure
- Semiconducting layer
ASJC Scopus subject areas
- Engineering(all)