Response kinetics of dielectric surface irradiated with ions to ozone influence

Aleksey I. Arbuzov, Vladimir Stanislavovich Dedkov, Alexander V. Kabyshev, Alexander A. Lucanin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Kinetics dependencies of electrical conduction of dielectrics irradiated with ions after influence ozone in air were considered. Possibility of the creation an ozone-sensitive elements on the base modified by ions BN and SiO2 was showed.

Original languageEnglish
Title of host publication8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004
Pages182-184
Number of pages3
Volume2
Publication statusPublished - 2004
Event8th Korea-Russia International Symposium on Science and Technology, KORUS 2004 - Tomsk, Russian Federation
Duration: 26 Jun 20043 Jul 2004

Other

Other8th Korea-Russia International Symposium on Science and Technology, KORUS 2004
CountryRussian Federation
CityTomsk
Period26.6.043.7.04

Fingerprint

Ozone
Kinetics
Ions
Air

Keywords

  • Dielectric
  • Modify surface
  • Ozone measure
  • Semiconducting layer

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Arbuzov, A. I., Dedkov, VS., Kabyshev, A. V., & Lucanin, A. A. (2004). Response kinetics of dielectric surface irradiated with ions to ozone influence. In 8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004 (Vol. 2, pp. 182-184)

Response kinetics of dielectric surface irradiated with ions to ozone influence. / Arbuzov, Aleksey I.; Dedkov, Vladimir Stanislavovich; Kabyshev, Alexander V.; Lucanin, Alexander A.

8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004. Vol. 2 2004. p. 182-184.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Arbuzov, AI, Dedkov, VS, Kabyshev, AV & Lucanin, AA 2004, Response kinetics of dielectric surface irradiated with ions to ozone influence. in 8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004. vol. 2, pp. 182-184, 8th Korea-Russia International Symposium on Science and Technology, KORUS 2004, Tomsk, Russian Federation, 26.6.04.
Arbuzov AI, Dedkov VS, Kabyshev AV, Lucanin AA. Response kinetics of dielectric surface irradiated with ions to ozone influence. In 8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004. Vol. 2. 2004. p. 182-184
Arbuzov, Aleksey I. ; Dedkov, Vladimir Stanislavovich ; Kabyshev, Alexander V. ; Lucanin, Alexander A. / Response kinetics of dielectric surface irradiated with ions to ozone influence. 8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004. Vol. 2 2004. pp. 182-184
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