Response kinetics of dielectric surface irradiated with ions to ozone influence

Aleksey I. Arbuzov, Vladimir Stanislavovich Dedkov, Alexander V. Kabyshev, Alexander A. Lucanin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Kinetics dependencies of electrical conduction of dielectrics irradiated with ions after influence ozone in air were considered. Possibility of the creation an ozone-sensitive elements on the base modified by ions BN and SiO2 was showed.

Original languageEnglish
Title of host publication8th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2004
Pages182-184
Number of pages3
Volume2
Publication statusPublished - 2004
Event8th Korea-Russia International Symposium on Science and Technology, KORUS 2004 - Tomsk, Russian Federation
Duration: 26 Jun 20043 Jul 2004

Other

Other8th Korea-Russia International Symposium on Science and Technology, KORUS 2004
CountryRussian Federation
CityTomsk
Period26.6.043.7.04

Keywords

  • Dielectric
  • Modify surface
  • Ozone measure
  • Semiconducting layer

ASJC Scopus subject areas

  • Engineering(all)

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