Resonators for real-time clocks based on epitaxial polysilicon process: A feasibility study on system-level compensation of temperature drifts

Giorgio Mussi, Marco Bestetti, Valentina Zega, Attilio Frangi, Gabriele Gattere, Giacomo Langfelder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

A statistical campaign on the frequency temperature coefficient (TCf) of resonators fabricated in a standard epitaxial polysilicon MEMS process, currently used for inertial sensors, is presented. The frequency variation is dominated by the elastic modulus temperature coefficient (TCE) and is not compensated at process level. The campaign examines four real-time clock (RTC) resonators, differing in geometry, resonance frequency (f0) and quality factor (Q). An accurate characterization on about 40 samples highlights the possibility to obtain oscillators with frequency stability within ±50 ppm and ±20 ppm with purely electronic compensation to 1st- and 2nd-order respectively, using family compensation and thus with no need for part-to-part TCf characterization.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages711-714
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 24 Apr 2018
Externally publishedYes
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period21.1.1825.1.18

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Mussi, G., Bestetti, M., Zega, V., Frangi, A., Gattere, G., & Langfelder, G. (2018). Resonators for real-time clocks based on epitaxial polysilicon process: A feasibility study on system-level compensation of temperature drifts. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 711-714). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346654