Abstract
In this work a theoretical research on modes of low-pressure glow discharge generation and its parameters in a large area hollow cathode are carried out. The relations describing the dependence of the burning voltage on the gas pressure and the geometry of the system were obtained. It is shown that it is possible to adjust the ion current density and burning voltage by external current injection independently of the surface area and material of the processed parts. This work also carries out a numerical study of the influence of plasma parameters on the heating of processed parts. Theoretical results are compared with experimental data.
| Original language | English |
|---|---|
| Title of host publication | IOP Conference Series: Materials Science and Engineering |
| Publisher | Institute of Physics Publishing |
| Volume | 81 |
| Edition | 1 |
| DOIs | |
| Publication status | Published - 23 Apr 2015 |
| Event | International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 - Tomsk, Russian Federation Duration: 3 Nov 2014 → 8 Nov 2014 |
Other
| Other | International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 3.11.14 → 8.11.14 |
ASJC Scopus subject areas
- Engineering(all)
- Materials Science(all)
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Koval, T. V., Lopatin, I. V., & Hung, N. B. (2015). Research on modes of plasma generation in low-pressure discharge for themal radiation processes. In IOP Conference Series: Materials Science and Engineering (1 ed., Vol. 81). [012056] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/81/1/012056