Research on modes of plasma generation in low-pressure discharge for themal radiation processes

T. V. Koval, I. V. Lopatin, Nguyen Bao Hung

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Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this work a theoretical research on modes of low-pressure glow discharge generation and its parameters in a large area hollow cathode are carried out. The relations describing the dependence of the burning voltage on the gas pressure and the geometry of the system were obtained. It is shown that it is possible to adjust the ion current density and burning voltage by external current injection independently of the surface area and material of the processed parts. This work also carries out a numerical study of the influence of plasma parameters on the heating of processed parts. Theoretical results are compared with experimental data.

Original language	English
Title of host publication	IOP Conference Series: Materials Science and Engineering
Publisher	Institute of Physics Publishing
Volume	81
Edition	1
DOIs	https://doi.org/10.1088/1757-899X/81/1/012056
Publication status	Published - 23 Apr 2015
Event	International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 - Tomsk, Russian Federation Duration: 3 Nov 2014 → 8 Nov 2014

Other

Other	International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014
Country	Russian Federation
City	Tomsk
Period	3.11.14 → 8.11.14

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ASJC Scopus subject areas

Engineering(all)
Materials Science(all)

Cite this

Koval, T. V., Lopatin, I. V., & Hung, N. B. (2015). Research on modes of plasma generation in low-pressure discharge for themal radiation processes. In IOP Conference Series: Materials Science and Engineering (1 ed., Vol. 81). [012056] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/81/1/012056

Koval, TV, Lopatin, IV & Hung, NB 2015, Research on modes of plasma generation in low-pressure discharge for themal radiation processes. in IOP Conference Series: Materials Science and Engineering. 1 edn, vol. 81, 012056, Institute of Physics Publishing, International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014, Tomsk, Russian Federation, 3.11.14. https://doi.org/10.1088/1757-899X/81/1/012056

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AB - In this work a theoretical research on modes of low-pressure glow discharge generation and its parameters in a large area hollow cathode are carried out. The relations describing the dependence of the burning voltage on the gas pressure and the geometry of the system were obtained. It is shown that it is possible to adjust the ion current density and burning voltage by external current injection independently of the surface area and material of the processed parts. This work also carries out a numerical study of the influence of plasma parameters on the heating of processed parts. Theoretical results are compared with experimental data.

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Access to Document

10.1088/1757-899X/81/1/012056