Research of reactive ion and plasma-chemical etching effect on diamond coating surface morphology

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
JournalAIP Conference Proceedings
Volume1772
DOIs
Publication statusPublished - 13 Oct 2016

Cite this

@article{e3cae78fd0b445bb917c02211d1e39db,
title = "Research of reactive ion and plasma-chemical etching effect on diamond coating surface morphology",
author = "Vitaly Okhotnikov and Stepan Linnik and Alexander Gaydaychuk",
year = "2016",
month = "10",
day = "13",
doi = "10.1063/1.4964566",
language = "English",
volume = "1772",
journal = "AIP Conference Proceedings",
issn = "0094-243X",
publisher = "American Institute of Physics Publising LLC",

}

TY - JOUR

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AU - Okhotnikov, Vitaly

AU - Linnik, Stepan

AU - Gaydaychuk, Alexander

PY - 2016/10/13

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VL - 1772

JO - AIP Conference Proceedings

JF - AIP Conference Proceedings

SN - 0094-243X

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