Abstract
In the article the results of research on the coefficient of target erosion made of GaAs at the influence of high-power pulsed ion beam are presented. In the experiments the source of high-power ion beams was used. The beam parameters are the following: ion energy is 250 keV, current density at the target is up to 250 A/cm 2, pulse duration is 80 ns. The coefficient of target erosion and its dependence on the number of subsequent pulses were changed. The increase of surface roughness (R z) parameter at the increase of number of subsequent current beam pulses and the formation of regular structure of surface relief at the pulse number of 20-40 were noticed.
| Original language | English |
|---|---|
| Title of host publication | 2008 17th International Conference on High Power Particle Beams, BEAMS'08 |
| Publication status | Published - 2008 |
| Event | 17th International Conference on High Power Particle Beams, BEAMS'08 - Xi'an, China Duration: 6 Jul 2008 → 11 Jul 2008 |
Other
| Other | 17th International Conference on High Power Particle Beams, BEAMS'08 |
|---|---|
| Country | China |
| City | Xi'an |
| Period | 6.7.08 → 11.7.08 |
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ASJC Scopus subject areas
- Nuclear and High Energy Physics
Cite this
Research of GaAs target erosion factor under influence of pulsed power ion beam. / Remnev, G. E.; Saltymakov, M. S.; Feng, Lie Zeng.
2008 17th International Conference on High Power Particle Beams, BEAMS'08. 2008. 6203007.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Research of GaAs target erosion factor under influence of pulsed power ion beam
AU - Remnev, G. E.
AU - Saltymakov, M. S.
AU - Feng, Lie Zeng
PY - 2008
Y1 - 2008
N2 - In the article the results of research on the coefficient of target erosion made of GaAs at the influence of high-power pulsed ion beam are presented. In the experiments the source of high-power ion beams was used. The beam parameters are the following: ion energy is 250 keV, current density at the target is up to 250 A/cm 2, pulse duration is 80 ns. The coefficient of target erosion and its dependence on the number of subsequent pulses were changed. The increase of surface roughness (R z) parameter at the increase of number of subsequent current beam pulses and the formation of regular structure of surface relief at the pulse number of 20-40 were noticed.
AB - In the article the results of research on the coefficient of target erosion made of GaAs at the influence of high-power pulsed ion beam are presented. In the experiments the source of high-power ion beams was used. The beam parameters are the following: ion energy is 250 keV, current density at the target is up to 250 A/cm 2, pulse duration is 80 ns. The coefficient of target erosion and its dependence on the number of subsequent pulses were changed. The increase of surface roughness (R z) parameter at the increase of number of subsequent current beam pulses and the formation of regular structure of surface relief at the pulse number of 20-40 were noticed.
UR - http://www.scopus.com/inward/record.url?scp=84862838829&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84862838829&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84862838829
BT - 2008 17th International Conference on High Power Particle Beams, BEAMS'08
ER -